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Chlorosilane disproportionation system equipment damage online monitoring device and method

A technology of system equipment and monitoring devices, applied in measuring devices, detecting the appearance of fluid at leakage points, testing fluid tightness, etc., can solve the problems of micro leakage inside the tube, detection of chlorosilane leakage, and failure to detect it in time , to achieve the effects of fast dynamic response, monitoring integrity, and reduced maintenance time and cost

Pending Publication Date: 2021-04-09
内蒙古兴洋科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, there is no mature technology to detect the leakage of chlorosilane at present, and the leakage will not be discovered until the equipment is seriously damaged, especially when there is a small amount of leakage inside the tube during the heat exchange process, it cannot be detected in time

Method used

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  • Chlorosilane disproportionation system equipment damage online monitoring device and method

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Embodiment 1

[0043] See attached figure 1 , the embodiment of the present invention discloses an online monitoring device for equipment damage of chlorosilane disproportionation system, which is installed on the main circulating water pipeline 1, and includes: secondary drainage pipe 2, flow cell 3, pH meter 4 and detection and alarm system;

[0044] Both ends of the auxiliary drainage pipe 2 are connected with the main circulating water pipeline 1, forming a parallel structure with the main circulating water pipeline 1;

[0045] There is one flow cell 3, which is connected in series with the auxiliary drainage pipe 2;

[0046] The number of PH meters 4 is the same as that of the flow cell 3, the PH meter 4 is detachably sealed with the flow cell 3, and the sensing probe of the PH meter 4 enters the cavity of the flow cell 3;

[0047] The detection and alarm system is electrically connected with the pH meter 4, and is used for detecting the pH value of the circulating liquid, and giving a...

Embodiment 2

[0059] The difference between this embodiment and Embodiment 1 lies in that there are two flow cells 3 and two pH meters 4 . The detection accuracy can be improved, and a PH meter can be prevented from being damaged so that the alarm cannot be realized.

[0060] Other structures and methods of this embodiment are the same as those of Embodiment 1, and will not be repeated here.

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Abstract

The invention discloses a chlorosilane disproportionation system equipment damage online monitoring device and method. The device is installed on a main circulating water pipeline, and the device comprises a drainage auxiliary pipe, flow cells, PH meters and a detection alarm system; two ends of the drainage auxiliary pipe are communicated with a main circulating water pipeline and form a parallel structure with the main circulating water pipeline; one or more flow cells are connected to the drainage auxiliary pipe in series; the number of the PH meters is the same as that of the flow cells, the PH meters are detachably connected with the flow cells in a sealed mode, and inductive probes of the PH meters enter cavities of the flow cells; the detection alarm system is electrically connected with the PH meters and is used for detecting the PH value of the circulating liquid and giving an alarm according to a set range value. Under the condition that heat exchanger equipment is not opened, whether chlorosilane leakage exists in circulating water and chilled water from the heat exchanger or not is detected through the PH meter, so the integrity of the monitoring equipment is monitored, and the safety of the equipment is guaranteed.

Description

technical field [0001] The invention relates to the technical field of electronic-grade silane production, and more specifically relates to an on-line monitoring device and method for equipment damage of a chlorosilane disproportionation system. Background technique [0002] At present, the disproportionation method is used to produce electronic grade silane. The disproportionation reaction of chlorosilane uses trichlorosilane as the raw material, and the middle part of the condensation is increased. Using the reactive distillation technology, the device and method for preparing silane through disproportionation reaction distillation, through multi-step disproportionation reaction, Eventually silane and silicon tetrachloride are formed. Silicon tetrachloride undergoes a hydrogenation reaction to generate trichlorosilane for recycling. The generation of silane needs to be purified by multi-stage condensation distillation, and finally high-purity silane is obtained. There ar...

Claims

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Application Information

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IPC IPC(8): G01M3/04G01M3/18
CPCG01M3/04G01M3/182G01M3/188
Inventor 陶刚义许亮
Owner 内蒙古兴洋科技股份有限公司
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