Counting type variable-pitch grating displacement sensor

Abstract

The invention relates to a counting type variable-pitch grating displacement sensor. The sensor comprises a collimation optical system and a Y-shaped optical fiber, wherein the collimation optical system is arranged in the sensor, the Y-shaped optical fiber penetrates into the sensor and is opposite to one side of the collimation optical system, a guide rail is arranged in a sensor shell, and a sliding block is arranged on the guide rail in a sliding mode through a connecting shaft; a reflecting mirror opposite to the other side of the collimating optical system is arranged on the inner side of the sliding part, and a variable-pitch grating opposite to the reflecting mirror is arranged at the bottom end in the sensor. The counting type variable-pitch grating displacement sensor is advantaged in that the counting type variable-pitch grating displacement sensor is provided, overall precision of the sensor is improved, the requirement for the guide rail machining precision is lowered, and applicability of the device is improved.

Description

technical field [0001] The invention relates to the field of electromagnetic interference-resistant displacement sensors, in particular to a counting variable grating pitch grating displacement sensor. Background technique [0002] At the end of the last century, the United States and other western developed countries first proposed several research plans for advanced components of the optical transmission system. Some large companies became contractors of the research project and developed several optical displacement sensors with different principles, some of which were obtained in the laboratory. Verification, some have passed related experiments. Many units in China have also carried out research in this area, among which the displacement sensor with counting variable pitch structure has passed the experiment of the principle prototype. The sensor of this principle can also be used in areas with strong electromagnetic fields in industrial production, replacing the exist...

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Problems solved by technology

[0004] However, in the existing technology, when the guide rail has an angle pitch due to its own accuracy, it will cause a change in the angle of the incident light, which will cause a change in the spectrum, resulting in an error in the final calculated displacement, while the actual displacement remains unchanged.

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