Tool clamp for improving detector chip cleaning process fragments

A detector chip and tooling fixture technology, which is applied in the direction of semiconductor devices, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc., can solve the problems of low structural strength of supporting silicon wafers, prone to fragments, large bottom, etc., and achieve reduction Fragmentation, Fragmentation Rate Improvement, Effective Effect

Pending Publication Date: 2021-05-07
SOUTH WEST INST OF TECHN PHYSICS
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is how to provide a tooling fixture for improving the chip cleaning process fragments of the detector, so as to s

Method used

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  • Tool clamp for improving detector chip cleaning process fragments
  • Tool clamp for improving detector chip cleaning process fragments

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Experimental program
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specific Embodiment approach

[0029] 1. Use the improved cleaning jig design drawing to process the cleaning boat;

[0030] 2. Verify the actual cleaning process of the processed PTFE cleaning boat;

[0031] 3. After multiple tape-out verifications, the tooling and clamping of fragments during the cleaning of the detector chip is improved, and the fragmentation rate during the cleaning process of the photosensitive chip of the silicon-based four-quadrant laser detector is significantly improved, and the improved method is applied to other scientific research projects. obvious.

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Abstract

The invention relates to a tool clamp for improving detector chip cleaning process fragments, and belongs to the field of chip manufacturing. The height of the cleaning boat of the tool clamp is 65 mm, and an enough space is reserved for a silicon wafer with the diameter of 50 mm; a pressing strip is arranged at the top of the cleaning boat so that the silicon wafer is limited in the cleaning boat in the cleaning process; and the two ends of the cleaning boat are additionally provided with handles respectively so that operators for cleaning the silicon wafers can operate conveniently. According to the tool clamp, the cleaning efficiency can be improved, fragments caused by an unstable water flow in the cleaning process are greatly reduced, a fragment rate in a silicon-based four-quadrant laser detector photosensitive chip cleaning process is obviously improved, and the effect is obvious when the improved method is applied to other scientific research projects.

Description

technical field [0001] The invention belongs to the field of chip manufacturing, and in particular relates to a tooling fixture for improving fragments in a detector chip cleaning process. Background technique [0002] The laser detector for 70mm rockets is mainly used to receive the 1064nm laser signal reflected from the target. It has the functions of realizing laser reception, photoelectric conversion, amplification and control processing, and providing signals for the seeker to capture the target and analyze and judge the target position. During combat, it is launched with the projectile, detects the laser signal reflected from the target and converts it into an electrical signal, which is processed into a flight track control signal through the circuit, and dies with the completion of the mission. [0003] The core technology of the detector is the preparation of a photosensitive chip. The structure of the photosensitive chip is a photodiode (referred to as PIN). A nea...

Claims

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Application Information

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IPC IPC(8): H01L21/673H01L21/67H01L31/18H01L31/105
CPCH01L21/67313H01L21/6704H01L31/1804H01L31/105Y02P70/50
Inventor 刘从吉蒲勋胡卫英王鸥周红轮钱煜曾璞
Owner SOUTH WEST INST OF TECHN PHYSICS
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