Tool clamp for improving detector chip cleaning process fragments

Abstract

The invention relates to a tool clamp for improving detector chip cleaning process fragments, and belongs to the field of chip manufacturing. The height of the cleaning boat of the tool clamp is 65 mm, and an enough space is reserved for a silicon wafer with the diameter of 50 mm; a pressing strip is arranged at the top of the cleaning boat so that the silicon wafer is limited in the cleaning boat in the cleaning process; and the two ends of the cleaning boat are additionally provided with handles respectively so that operators for cleaning the silicon wafers can operate conveniently. According to the tool clamp, the cleaning efficiency can be improved, fragments caused by an unstable water flow in the cleaning process are greatly reduced, a fragment rate in a silicon-based four-quadrant laser detector photosensitive chip cleaning process is obviously improved, and the effect is obvious when the improved method is applied to other scientific research projects.

Description

technical field [0001] The invention belongs to the field of chip manufacturing, and in particular relates to a tooling fixture for improving fragments in a detector chip cleaning process. Background technique [0002] The laser detector for 70mm rockets is mainly used to receive the 1064nm laser signal reflected from the target. It has the functions of realizing laser reception, photoelectric conversion, amplification and control processing, and providing signals for the seeker to capture the target and analyze and judge the target position. During combat, it is launched with the projectile, detects the laser signal reflected from the target and converts it into an electrical signal, which is processed into a flight track control signal through the circuit, and dies with the completion of the mission. [0003] The core technology of the detector is the preparation of a photosensitive chip. The structure of the photosensitive chip is a photodiode (referred to as PIN). A nea...

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is how to provide a tooling fixture for improving the chip cleaning process fragments of the detector, so as to s

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