Substrate frame for ARC coating production line

A technology of coating production line and substrate holder, which is applied in sputtering coating, ion implantation coating, gaseous chemical coating, etc., can solve the problems of high probability of shaking, damage, long production line, etc.

Inactive Publication Date: 2021-05-14
XIANGTAN HONGDA VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

ARC coating requires multi-layer coating, the production line is long, and there is a high probability of shaking when the substrate is loaded on the substrate rack
In addition, multiple and multiple substrat

Method used

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  • Substrate frame for ARC coating production line
  • Substrate frame for ARC coating production line
  • Substrate frame for ARC coating production line

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0020] The substrate frame used in the ARC coating production line provided by the present invention will be further described in detail and completely below in conjunction with the embodiments. The embodiments described below are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0021] Substrate holders for ARC coating lines, such as Figure 1 ~ Figure 4 As shown, it is used to load the substrate to be coated, and the substrate rack runs on the coating production line. Comprising a substrate holder body 1, a frame assembly and a cover assembly, the frame assembly is connected to each side of the substrate holder body 1, the substrate holder body 1 is provided with a substrate area, and the substrate area includes a first substrate area, a second substrate area independent of each other The second substrate area 6 and the third substrate area 7, the cover plate assembly includes a first cover plate 8, a second...

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PUM

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Abstract

The invention provides a substrate frame for an ARC coating production line. The substrate frame is used for loading a to-be-coated substrate, runs on the coating production line and comprises a substrate frame body, a frame assembly and a cover plate assembly, wherein the frame assembly is connected with each side edge of the substrate frame body, the substrate frame body is provided with substrate areas, the substrate areas include a first substrate area, a second substrate area and a third substrate area which are mutually independent, the cover plate assembly comprises a first cover plate, a second cover plate and a third cover plate, and the first cover plate, the second cover plate and the third cover plate detachably cover the first substrate area, the second substrate area and the third substrate area respectively. The substrate frame can load various substrates and a plurality of substrates, the substrate frame body is divided into the multiple substrate areas, each substrate area is correspondingly provided with one cover plate, and the cover plates detachably cover the corresponding substrate areas, so that all the substrate areas are utilized in a partitioned mode and are prevented from being polluted; and the frame assembly protects the substrate frame body and is stable in load bearing.

Description

technical field [0001] The invention relates to the technical field of coating production, in particular to a substrate frame used in an ARC coating production line. Background technique [0002] Vacuum coating technology is to use physical and chemical means to coat the solid surface with a layer of coating with special properties, so that the solid surface has wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic conductivity, insulation and decoration. Many lamps are superior to the superior performance of solid materials themselves, to improve product quality, prolong product life, save energy and obtain significant technical and economic benefits. What needs to be coated is called a substrate, that is, the substrate needs to be coated. The coating operation on the substrate needs to be carried out on the coating production line, and the substrate needs to be loaded on the substra...

Claims

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Application Information

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IPC IPC(8): C23C14/50C23C16/458
CPCC23C14/50C23C16/4587
Inventor 祝海生陈立薛闯凌云孙桂红梁红黄国兴黄乐
Owner XIANGTAN HONGDA VACUUM TECH CO LTD
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