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Vacuum robot, vacuum motor, and vacuum motor encoder

A robot and vacuum technology, applied in the direction of manipulators, electromechanical devices, control mechanical energy, etc., can solve the problem of releasing impurity gases and achieve the effect of reducing the generation of impurity gases

Pending Publication Date: 2021-05-14
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem that if the sealing material is heated, impurity gas may be released into the space where the rotating plate is arranged.

Method used

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  • Vacuum robot, vacuum motor, and vacuum motor encoder
  • Vacuum robot, vacuum motor, and vacuum motor encoder
  • Vacuum robot, vacuum motor, and vacuum motor encoder

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Embodiment Construction

[0052] Hereinafter, an embodiment will be described with reference to the drawings.

[0053]

[0054] First, refer to figure 1 An example of the configuration of the robot system 1 according to this embodiment will be described. figure 1 It is a schematic diagram showing an example of a schematic configuration of the robot system 1 .

[0055] The robot system 1 is a workpiece processing system including a vacuum robot 3 that conveys a workpiece W in a vacuum environment, and is applied to various applications such as a semiconductor manufacturing system and a liquid crystal manufacturing system, for example. In this embodiment, a case where the robot system 1 is a semiconductor manufacturing system that processes semiconductor wafers will be described.

[0056] Such as figure 1 As shown, the robot system 1 has a vacuum robot 3 , a transfer chamber 5 , a processing chamber 7 and a cassette chamber 9 . The robot system 1 is a multi-chamber processing system that continuous...

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PUM

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Abstract

A vacuum robot, a vacuum motor, and a vacuum motor encoder are provided. The generation of foreign gas in an encoder for a vacuum motor is reduced. A first vacuum motor (M1) is provided with a first rotating shaft member (73) extending in the axial direction; a bearing (97) that rotatably supports the first rotating shaft member (73); a disc (145) which can rotate together with the first rotating shaft member (73) and in which a slit is formed; a first bracket (95) which is made of a non-magnetic material and supports the bearing (97); a recess (151) formed in the first bracket (95) so as to be recessed in the axial direction; and a sensor unit (147) that is disposed so as to face the disk (145) in the axial direction across a thin portion (185) formed by the recessed portion (151) and detects the gap, in which a space in which the sensor unit (147) is disposed and which becomes atmospheric pressure and a space in which the disk (145) is disposed and which is decompressed to a pressure lower than atmospheric pressure are isolated by the thin part (185).

Description

technical field [0001] The disclosed embodiments relate to a vacuum robot, a vacuum motor, and a vacuum motor encoder. Background technique [0002] Patent Document 1 describes a vacuum robot including a vacuum motor. The motor for vacuum has: a rotating plate, which has a symbol generating a signal arranged on the surface; a sensor, which is arranged opposite to the surface of the rotating plate, and can detect a signal; The part of the chamber facing the sensor is provided with an opening; and the transmission window is provided to block the opening to allow the signal to pass through, and the inner space of the sensor chamber is separated from the space where the rotating plate is arranged. [0003] prior art literature [0004] patent documents [0005] Patent Document 1: Japanese Patent Laid-Open No. 2012-231652 [0006] In the structure of the prior art described above, generally, a sealing process with a sealing material is performed between the opening of the sen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K29/08H02K5/16H02K11/215
CPCH02K29/08H02K5/165H02K11/215H01L21/67742H02K7/088H02K5/1737B25J9/043B25J9/108B25J9/126B25J19/02H01L21/67167H02K7/003H02K5/16H02K11/22B25J11/0095H01L21/68707B65G47/90B25J19/027
Inventor 原田正信赤江裕光岩﨑则久
Owner YASKAWA DENKI KK