High-voltage testing method of stack testing machine channel

Abstract

The invention relates to the technical field of semiconductor testing, and particularly relates to a high-voltage testing method of a stack testing machine channel. The method specifically comprises the steps of S1, starting power-on initialization; S2, starting a self-check test, and if the self-check test passes, judging whether user grouping configuration is carried out or not, if not, sending a non-passing signal to the main control system; S3, judging whether user grouping configuration is carried out or not, if so, carrying out channel stacking processing configuration and suppression circuit noise processing configuration, and if not, directly entering channel configuration; S4, entering channel configuration; S5, carrying out channel self-inspection, and if self-inspection is successful, enabling the whole machine to complete self-inspection, and if the self-inspection is unsuccessful, sending an unsuccessful signal to the main control system; S6, enabling the whole machine to complete self-inspection; and S7, ending. Compared with the prior art, different voltage output and detection channels are isolated, so that different channels can be stacked for use, each channel can output 8-10V voltage, and the purpose of outputting high voltage is achieved through stacking of positive and negative ends.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a high-voltage testing method for stacking testing machine channels. Background technique [0002] In the field of chip testing, there is often a need to measure and provide high voltage. In practical applications, the voltage range often needs to cover more than 100V. The automatic testing machine not only needs to provide a voltage of more than 100V as a power supply, but also needs to accurately measure the corresponding voltage. But usually the automatic testing machines of most manufacturers cannot directly provide high voltage above 100V. The usual method is to use a specially designed high-voltage module to amplify the voltage output range. In terms of output voltage, the disadvantage of this method is that the accuracy deteriorates. Because the added one-stage operational amplifier circuit introduces a second-stage error, the accuracy of the output voltage ...

AI Technical Summary

Problems solved by technology

But usually the automatic testing machines of most manufacturers cannot directly provide high voltage above 100V. The usual method is to use a specially designed high-voltage module to amplify the voltage output range. In terms of output voltage, the disadvantage of this method is that the accuracy deteriorates. Because the added one-stage operational amplifier circuit introduces a second-stage error, resulting in poorer output voltage accuracy

In terms of measuring voltage, the accuracy also deteriorates, because the number of ADC digits measured does not increase, but the voltage range expands, and the conversion accuracy will inevitably decrease.

At the same time, due to the use of specially designed high-voltage modules, users need to purchase different equipment modules, which also causes waste of customers' existing low-voltage modules and increases test costs.

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