Device for adjusting angle of sample table of vacuum equipment
A sample table and flange technology, applied in the field of microelectronics, can solve the problems of reducing production efficiency, increasing working time, destroying the vacuum environment of the chamber, etc., and achieve the effect of reducing production efficiency and increasing working time
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[0024] The embodiment of the present invention provides a device for adjusting the angle of the sample stage of vacuum equipment, please refer to figure 1 , figure 2 , the device includes:
[0025] Base plate flange 1; fixed rod 2, one end of the fixed rod 2 is vertically connected to the lower surface of the base plate flange 1; coupling 3, the other end of the fixed rod 1 is connected to the shaft coupling 3 , and the coupling 3 is connected to the sample stage 4;
[0026] Further, the lower surface of the bottom plate flange 1 adopts a smooth surface.
[0027] Specifically, the device for adjusting the angle of the vacuum equipment sample stage in the embodiment of the present application includes: a bottom plate flange 1, a fixed rod 2, a coupling 3, a support frame 5, a support flange 6, a screw flange 11, a slide Block 10, motor 8, bellows 12, etc. Firstly, one end of the fixing rod 2 is vertically installed on the lower surface of the bottom flange 1, and the lower...
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