Conveying device for inserting silicon wafer, wafer basket, wafer inserting mechanism and wafer inserting method

Abstract

The invention discloses a conveying device for inserting a silicon wafer, a wafer basket, a wafer inserting mechanism and a wafer inserting method. The wafer inserting mechanism comprises the conveying device and the wafer basket, the wafer basket is located on one side of the conveying device, a corresponding containing space is formed in the wafer basket, one end of the conveying device can be inserted in the containing space in a telescopic mode, and therefore the conveying device can directly feed silicon wafers into the wafer basket, the occurrence of a card clamping condition can be avoided, and the silicon wafer quality and the processing capacity are improved.

Description

technical field [0001] The invention relates to the field of silicon wafer processing equipment, in particular to a transfer device, a wafer basket, a wafer insertion mechanism and a wafer insertion method for inserting silicon wafers. Background technique [0002] Silicon wafer processing includes degumming, inserting, cleaning, silicon wafers are loaded into clips after degumming; the inserting machine is equipped with a transfer device, and the clips are loaded into the inserting machine and placed on the side of the transfer device, and then transferred On the other side of the device, there are chip baskets at intervals, and there is a certain distance between the chip basket and the conveying device; the silicon wafers in the magazine are separated by hydraulic pressure and moved to the conveyor belt piece by piece, and then conveyed with the conveyor belt. , the silicon wafer moves towards the direction of the wafer basket. When the silicon wafer moves to a certain po...

AI Technical Summary

Problems solved by technology

[0003] At present, the processing of large-size silicon wafers or ultra-large-size silicon wafers has become the follow-up development trend of photovoltaics. However, when the size of silicon wafers becomes larger, it will be more difficult to insert silicon wafers into baskets during the processing of the above-mentioned production lines, because during the process of inserting silicon wafers, There is water attached to it, and the silicon wafer is very thin, so due to the weight, there will be a certain downward deformation in the middle of the silicon wafer, so it is not easy for such a silicon wafer to be completely aligned with the slot of the wafer basket, so that when the wafer is punched When the basket is used, cards will be produced, and the cards will cause damage to silicon wafers, thereby affecting the quality of silicon wafers and processing capacity

Images