Electronic grade chlorine trifluoride filling device and filling method thereof
A chlorine trifluoride, electronic-grade technology, applied in the field of electronic-grade chlorine trifluoride filling devices, can solve the problem of inappropriate electronic-grade chlorine trifluoride filling, no-to-use chlorine trifluoride filling method, flow and process. equipment and other problems to achieve the effect of improving safety, reducing operation and reducing accident hazards
Active Publication Date: 2021-09-24
FUJIAN DEER TECH CORP
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Problems solved by technology
Although there is a preparation process for industrial-grade chlorine trifluoride in China, its product filling method and equipment are not suitable for filling electronic grade chlorine trifluoride, and there is no domestic chlorine trifluoride filling method, process and equipment
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[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is some embodiments of the present invention, but not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the implementation manners in the present invention, all other implement...
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The invention provides a filling device for electronic grade chlorine trifluoride and a filling method thereof. The device includes: a filling unit, including a filling tank, an electronic scale for detecting the weight of the filling tank, and a cooling component for cooling the filling tank; Chlorine supply pipelines, fluorine gas supply pipelines, nitrogen gas supply pipelines and emptying detection pipelines, filters and automatic valves arranged in each pipeline; protection unit, including inner protection for accommodating the filling detection unit Layer, outer protective layer, condensing assembly, inert gas inlet, inert gas outlet, a protective chamber for containing inert gas is formed between the inner protective layer and the outer protective layer, the condensing assembly is arranged in the protective chamber, the inert gas inlet and the inert gas outlet communicate with the protection cavity respectively.
Description
technical field [0001] The invention relates to a filling device for electronic grade chlorine trifluoride and a filling method thereof. Background technique [0002] Chlorine trifluoride is a strong oxidizing agent that can react with most organic and inorganic materials and even metal materials, and can cause many materials to burn violently and even explode in some cases. Due to the special oxidation of chlorine trifluoride, there are strict requirements on filling methods and equipment. Although there is a preparation process for industrial grade chlorine trifluoride in China, its product filling method and equipment are not suitable for filling electronic grade chlorine trifluoride, and there is no domestic chlorine trifluoride filling method, process and equipment. Contents of the invention [0003] The invention provides a filling device for electronic grade chlorine trifluoride and a filling method thereof, which can effectively solve the above problems. [0004]...
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IPC IPC(8): F17C5/04F17C13/02
CPCF17C5/04F17C13/02
Inventor 李纪明陈施华申黎明华小林周玉川
Owner FUJIAN DEER TECH CORP