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L-shaped vacuum valve of semiconductor equipment

A vacuum valve, semiconductor technology, applied in mechanical equipment, valve details, valve devices, etc., can solve the problems of easy loss, high maintenance cost, poor sealing effect, etc.

Pending Publication Date: 2021-06-18
SICHUAN JIUTIAN VACUUM TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and provide an L-type vacuum valve for semiconductor equipment to solve the problems of easy loss, poor sealing effect and high maintenance cost

Method used

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  • L-shaped vacuum valve of semiconductor equipment
  • L-shaped vacuum valve of semiconductor equipment
  • L-shaped vacuum valve of semiconductor equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as Figure 1 to 5 As shown, the present embodiment discloses a semiconductor device L-type vacuum valve, including a valve plate 1, a moving member 9, and a moving guide member 11, and the valve plate 1 is connected to the valve stem 2, and the mounting plate 3 is used to mount the valve. A through hole is provided in the middle of the mounting plate 3, and the through hole is used to mount the valve stem 2, the valve stem 2 is connected to the moving member 9, and the middle portion of the bottom plate 7 is provided with a groove 8, and the bottom of the valve stem 2 is provided with a boss 12, a boss. 12 corresponds to the position of the groove 8, and a spring 13 is mounted between the boss 12 and the groove 8;

[0027] The mounting plate 3 is provided with two independently complete air passages, and the lower portion of the mounting plate 3 is mounted with the first cylinder 4 and the second cylinder 10, and the first air inlet 5 and the second ventilator are provi...

Embodiment 2

[0033]The present embodiment is substantially similar to the embodiment, and the present embodiment is that the embodiment is substantially similar to the embodiment, and the difference is that the first vent 5 starts intake during the valve opening, and the second air port 6 is exhausted. The air path connection inside the mounting plate 3, the first cylinder 4, the second cylinder 10, and the mechanical limit cylinder 4.1 starts, the first piston end 4.11 shrinks away from the first constituent hole 11.11, the piston rod 4.2 stretch, the bottom plate 7 Sports, the driving guide rail 11 moves along the first guide rail 11.1, since the spring 13 starts recovery, the motion guide rail 11 and the moving member 9 relatively move, the fixture is coordinated with the curved groove, two fixing parts from two curved shapes The lower end of the groove moves to the upper end, so that the moving member 9 and the valve stem 2 are deflected in the direction away from the valve, and the spring...

Embodiment 3

[0036] The present embodiment is substantially similar to the embodiment, and the differential tank 15 is provided by the sealing groove of the valve plate 1. When the valve is closed, the moving member 9 is deflected, the valve plate 2 is extruded, the seal ring Started to be squeezed until the seal is completely attached to the inner wall of the sealing tank. At this time, the air in the previous gap is discharged through the venting tank 15, and the valve is further ensured that the valve is sealed with high vacuum requirements.

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Abstract

The invention discloses an L-shaped vacuum valve of semiconductor equipment. The L-shaped vacuum valve comprises a valve plate, a moving part and moving guide rail parts, wherein the valve plate is connected with a valve rod; the valve rod is connected with the moving part; two independent and complete air paths are arranged in a mounting plate; a first air cylinder and a second air cylinder are mounted on the lower portion of the mounting plate; the air paths of the two air cylinders are connected and communicated through the two air paths in the mounting plate; mechanical limiting air cylinders are arranged on the inner sides of the air cylinders; piston rods of the first air cylinder and the second air cylinder are connected with a bottom plate; the bottom plate is connected with the two moving guide rail parts; first guide rail grooves are formed in the side faces of moving guide rail parts and matched with the mechanical limiting air cylinders for limiting; two arc grooves are formed in the other face of each moving guide rail part; and the arc grooves and fixed parts on the moving part move in a matched mode. The L-shaped vacuum valve is simple in overall structure, low in component loss, low in maintenance cost, high in sealing stability and durability and safe to operate.

Description

Technical field [0001] The present invention relates to the field of semiconductor manufacturing techniques, and more particularly to a semiconductor device L-vacuum valve. Background technique [0002] In the semiconductor manufacturing process, a vacuum chamber (such as load lock, conveying device, processing chamber) is typically placed as a cluster, in-line or clustered, in-line combination to process wafers. These systems can process wafers in a single substrate or batch substrate. In the processing engineering, the wafer is transmitted between the chamber, such as transferring the wafer from the transfer chamber to the process chamber, and the chamber must be maintained or established. In order to allow wafer to enter the cavity chamber, a vacuum operation can be performed, and a valve is typically set on the wall between the chamber and the chamber. [0003] With the rapid development of semiconductor technology, the semiconductor wafer is more sensitive to pollution, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K51/02F16K27/00F16K31/122F16K35/02F15B15/14F15B15/20F15B15/24F15B15/26
CPCF15B15/1423F15B15/149F15B15/20F15B15/24F15B15/261F16K27/00F16K31/1225F16K35/022F16K51/02
Inventor 胡开鹏张魁榜齐英陈林
Owner SICHUAN JIUTIAN VACUUM TECH CO LTD