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Supporting mechanism, material pushing device, loading machine table and PECVD equipment

A technology of support mechanism and support piece, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve problems such as poor support ability of support rods

Pending Publication Date: 2021-07-13
JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to address the problem of the poor supporting capacity of the support rods in the existing boat pushing mechanism, to provide a graphite boat capable of supporting a larger weight and size, to improve the processing efficiency of the supporting mechanism, pushing device, Loader and PECVD equipment

Method used

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  • Supporting mechanism, material pushing device, loading machine table and PECVD equipment
  • Supporting mechanism, material pushing device, loading machine table and PECVD equipment
  • Supporting mechanism, material pushing device, loading machine table and PECVD equipment

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Embodiment Construction

[0024] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0025] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counte...

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Abstract

The invention relates to a supporting mechanism, the supporting mechanism comprises at least two supporting assemblies and at least two bearing rods, one end of each bearing rod is inserted into one corresponding sleeve in the axial direction of the sleeve, and the other end of each bearing rod protrudes out of the end, away from the sleeve, of a supporting piece, that is to say, the at least two bearing rods are arranged at intervals in X direction, bearing surfaces of all the bearing rods form bearing positions used for bearing graphite boats, the matching surface of each bearing rod relative to the bearing surface is supported on the supporting surface of the corresponding supporting piece, so that the supporting capacity of the bearing rods is improved, the bearing capacity of the bearing rods is further improved, at least two bearing rods can bear graphite boats with heavy weight and large size, and the machining efficiency is improved. The invention further relates to a material pushing device, a loading machine table and PECVD equipment.

Description

technical field [0001] The invention relates to the technical field of photovoltaic production equipment, in particular to a support mechanism, a material pushing device, a loading machine platform and PECVD equipment. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition, Plasma Enhanced Chemical Vapor Deposition) equipment is mainly used to deposit a layer of anti-reflection film on silicon wafers to improve the power generation efficiency of solar cells. [0003] At present, PECVD equipment generally arranges a plurality of reaction furnace tubes in the vertical direction, and each reaction furnace tube corresponds to a set of boat pushing mechanism, which is used to push the graphite boat transported by the manipulator into the reaction furnace tube. However, the supporting rods supporting graphite boats in the existing boat pushing mechanism have poor support ability, and can only support light weight and small graphite boats, that is, the graph...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/50C23C16/458H01L31/0216H01L31/18
CPCC23C16/50C23C16/4587H01L31/1804H01L31/02168Y02P70/50
Inventor 王荣严大黎微明李翔胡磊左敏
Owner JIANGSU MICROVIA NANO EQUIP TECH CO LTD