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Filtering liquid storage device

A liquid storage device, filter storage technology, applied in sedimentation tanks, chemical instruments and methods, separation methods, etc., can solve the problem that particulate pollutants cannot be effectively filtered, achieve convenient implementation and maintenance process, and reduce equipment maintenance. Cost and load reduction effect

Pending Publication Date: 2021-07-16
ACM RES SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a filter liquid storage device, which is used to solve the problem in the prior art that the particulate pollutants of the recycled chemical liquid cannot be effectively filtered

Method used

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  • Filtering liquid storage device
  • Filtering liquid storage device

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Experimental program
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Embodiment 1

[0077] see figure 1 , the present embodiment provides a filter liquid storage device, comprising:

[0078] Tank body 101, which is used to accommodate chemical liquid;

[0079] An overflow bar 102, which is used to divide the tank body 101 into a first sub-trough 101a and a second sub-trough 101b; the height of the overflow bar 102 is lower than the height of the tank body 101; the first The chemical liquid in the sub-tank 101a overflows to the second sub-tank 101b through the top of the overflow column 102;

[0080] A liquid return pipeline 103, which is connected to the first sub-tank 101a, for recovering the chemical liquid and transporting the chemical liquid to the first sub-tank 101a;

[0081] The liquid supply pipeline 104 is connected to the second sub-tank 101b for supplying the chemical liquid from the second sub-tank 101b to the liquid-using device 200 .

[0082] Such as figure 1 As shown, the filter liquid storage device provided in this embodiment includes a t...

Embodiment 2

[0095] see figure 2 , this embodiment provides a filtering liquid storage device. Compared with the solution of setting separate tanks on the left and right in Embodiment 1, the difference of this embodiment is that in this embodiment, the tank body 401 is a cylindrical tank, The overflow column 402 is a cylindrical partition wall coaxial with the tank body 401, see figure 2 , the overflow column 402 divides the tank body 401 into a first sub-groove 401a located in the inner ring and a second sub-groove 401b surrounding the periphery of the first sub-groove 401a, the chemical liquid will flow from all the inner ring The first sub-groove 401a overflows into the peripheral second sub-groove 401b through the top of the overflow column 402 .

[0096] As an example, such as figure 2 As shown, the liquid return pipeline 403 is disposed in the central area of ​​the first sub-groove 401 a, and its height is lower than that of the overflow column 402 . The chemical liquid dischar...

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Abstract

The invention provides a filtering liquid storage device, which comprises a tank body used for containing chemical liquid; an overflow fence used for dividing the tank body into a first sub-tank and a second sub-tank; wherein the overflow fence is lower than the tank body; and the chemical liquid in the first sub-tank overflows to the second sub-tank through the top of the overflow fence; a liquid return pipeline connected with the first sub-tank and used for recovering the chemical liquid and conveying the chemical liquid to the first sub-tank; and a liquid supply pipeline connected with the second sub-tank and used for supplying the chemical liquid to the liquid using equipment from the second sub-tank. By introducing the tank body separated by the overflow fence, when the chemical liquid overflows from the top of the overflow fence, particulate pollutants spontaneously sink under the action of gravity and are removed, so that the clean chemical liquid is obtained. The filtering liquid storage device can effectively remove particulate pollutants in circulating chemical liquid, the implementation and maintenance process is convenient and easy to implement, the load of an equipment filter is reduced, and the equipment maintenance cost can be effectively reduced.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing equipment, in particular to a filter liquid storage device. Background technique [0002] In the semiconductor process, the recycling of chemical liquid is usually involved. After the chemical liquid used for cleaning or polishing is used in the process chamber of the liquid-using equipment, it is collected and returned to a special liquid storage tank for storage, and the liquid storage tank supplies liquid to the liquid-using equipment again. The chemical liquid circulates between the liquid storage tank and the process chamber, thereby realizing the recycling of the chemical liquid. [0003] After the chemical liquid is used in the process chamber, particle pollutants are often doped in the recovered chemical liquid, especially tiny particles, whose particle size is usually 5-10 μm. The contamination of the wafer surface by such particulate pollutants will affect the normal process ...

Claims

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Application Information

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IPC IPC(8): B01D21/02B01D21/34
CPCB01D21/0042B01D21/0045B01D21/02B01D21/34
Inventor 焦欣欣胡文俊吴均王坚王晖
Owner ACM RES SHANGHAI
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