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Light-emitting device, detection method and detection equipment

A light-emitting device and light beam technology, which is applied in the direction of measuring devices, optical testing of defects/defects, and material analysis through optical means, can solve problems such as damage to optical components and affect the service life of optical components, so as to reduce damage and improve detection efficiency Effect

Pending Publication Date: 2021-07-16
SKYVERSE TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Then the light beam emitted by the above light source will damage the optical elements in the optical path, directly affecting the service life of the optical elements in the optical path

Method used

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  • Light-emitting device, detection method and detection equipment
  • Light-emitting device, detection method and detection equipment
  • Light-emitting device, detection method and detection equipment

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Embodiment Construction

[0075] The details of the present invention can be understood more clearly with reference to the accompanying drawings and the description of specific embodiments of the present invention. However, the specific embodiments of the present invention described here are only for the purpose of explaining the present invention, and should not be construed as limiting the present invention in any way. Under the teaching of the present invention, the skilled person can conceive any possible modification based on the present invention, and these should be regarded as belonging to the scope of the present invention. It should be noted that when an element is referred to as being “disposed on” another element, it may be directly on the other element or there may also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "mounted", "connec...

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Abstract

The invention discloses a light-emitting device, a detection method and detection equipment. The light-emitting device comprises a detection light source which is used for providing an incident light beam, and at least one group of incident assemblies which comprises a beam expanding assembly and a converging assembly. The beam expanding assembly is used for expanding an incident light beam in a first direction to form a detection light beam; and the converging assembly is used for converging the detection light beam to a focal plane and forming strip-shaped light spots on the focal plane, and the first direction is perpendicular to the extension direction of the strip-shaped light spots. According to the invention, the detection efficiency can be improved, the service life of the optical element is prolonged, in addition, the oblique incident light spot intensity is uniform, and the detection precision is improved.

Description

technical field [0001] The invention relates to the technical field of mirror surface defect detection, in particular to a light emitting device, a detection method, and detection equipment. Background technique [0002] The statements in this section only provide background information related to the present disclosure and may not constitute prior art. [0003] At present, the detection equipment for mirror defects usually adopts dark field scanning technology. When the detection light is irradiated on the mirror surface, scattered light will be generated at the position of the defect on the mirror surface. After the scattered light is received by the detector, the relevant defect information of the mirror surface can be obtained by inverting the scattered light, so as to realize the detection of the mirror surface. Defect detection. [0004] For example, the surface of a wafer (silicon wafer used in the manufacture of silicon semiconductor integrated circuits) is a typic...

Claims

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Application Information

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IPC IPC(8): G01N21/95
CPCG01N21/95G01N21/9505G01N21/8806G01N2021/8822G01N2021/8835G01N2201/061
Inventor 陈鲁黄有为张龙张嵩
Owner SKYVERSE TECH CO LTD