Multi-step type electrostatic probe head
An electrostatic probe and multi-step technology, which is applied in the field of electrostatic probes, can solve the problems of multi-step probes with large volume, large influence of plasma, and no simultaneous measurement, etc., to reduce mutual shielding and signal interference, reduce the number of needles, The effect of reducing the impact
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0043] like figure 1 As shown, a multi-step electrostatic probe probe includes a graphite sheath 10, a first dual probe 1, a second dual probe 2, a first suspension potential probe 3, a second suspension potential probe 4, Three suspended potential probe 7, fourth suspension potential probe 8, fifth suspension potential probe 9, first Mach probe 5 and second Mach probes 6;
[0044] The top of the graphite sheath 9 is ladder structure, and the ladder structure includes a radially first step, a radially second step and a radially third step, the radial second step and a radial direction The height of the three steps is lower than the radial first step, and the radial position of the radial second step and the radial third step is different;
[0045] The top of the first dual probe 1 and the second dual probe 2 are circularly distributed on the radial first step surface, the first suspension potential probe 3, the second suspension potential probe 4 and the third The suspension poten...
Embodiment 2
[0052] like figure 1 As shown, the present embodiment is based on the first embodiment, the first dual probe 1, the second dual probe 2, the first suspension potential probe 3, the second The suspension potential probe 4, the third suspension potential probe 7, the fourth suspension potential probe 8, the fifth suspension potential probe 9, the first Mach probe 5 and the top needle of the second Mach probe 6 are the same; The first dual probe 1, the second dual probe 2, the first suspension potential probe 3, the second suspension potential probe 4, the third suspension potential probe 7, the fourth suspension potential probe 8, fifth Suspension potential probe 9, the diameter of the top needle of the first Mach probe 5 and the second Mach probe 6 is 2 mm to 4 mm.
PUM
Property | Measurement | Unit |
---|---|---|
diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com