Motion mechanism plane three-degree-of-freedom measuring device and method based on PSD sensor

Abstract

The invention relates to a motion mechanism plane three-degree-of-freedom measuring device and method based on a PSD sensor. The device comprises a laser, a plurality of PSD sensors, a plurality of signal processing boards and a multi-channel AD signal acquisition card, wherein the laser and the PSD sensors move relatively; when laser irradiates a photosensitive part of the PSD sensor, the translational motion of the laser relative to the plane X and Y axes of the PSD sensor and the rotational motion around the Z axis of the laser relative to the PSD sensor are calculated through a voltage signal of the PSD sensor; a motion mechanism carrying the device can realize non-contact plane three-degree-of-freedom measurement; The device is advantaged in that a problem that a conventional sensor is difficult to measure the three degrees of freedom of a plane at one time is solved, and compared with traditional machine vision measurement, the sensor has higher precision and sampling frequency and can meet the requirement for real-time measurement feedback of a tail end of a planar motion mechanism.

Description

technical field [0001] The invention relates to a motion state measurement device and method at the end of a motion mechanism, in particular to a non-contact measurement device and method for a plane three-degree-of-freedom of a motion mechanism. Background technique [0002] At present, the motion control of mechanisms can be generally divided into open-loop control systems, semi-closed-loop control systems that only include joint feedback, and fully-closed-loop systems that include joint feedback and terminal feedback. However, due to cost constraints and the lack of suitable multi-degree-of-freedom measurement methods, most of the mechanisms are semi-closed-loop mechanisms that only include drive joint feedback. Although the driving joint has the ability to achieve high-precision positioning control, the transmission chain will introduce nonlinear factors such as machining and assembly errors, clearances, friction, and elastic deformation, which limit the kinematic perfor...

AI Technical Summary

Problems solved by technology

Therefore, the end degree of freedom measurement feedback of the mechanism is an important technical means to improve the movement performance of the mechanism. It is undoubtedly an ideal solution to increase the end sensor to build a full-closed-loop control system, but the existing sensor measurement degrees of freedom are limited, and there is currently a lack of suitable multi-freedom Degree sensor is used for end-of-mechanism feedback

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