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Bending transducer as an actuator, bending transducer as a sensor, bending transducer system

A transducer, bending technology, applied in the field of bending transducers, capable of solving problems such as possible measures to improve and adjust linearity that are not described

Pending Publication Date: 2021-07-30
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] WO 2095185 A1 describes how to design MEMS devices with high performance and low power consumption, but does not describe possible measures to improve and adjust linearity

Method used

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  • Bending transducer as an actuator, bending transducer as a sensor, bending transducer system
  • Bending transducer as an actuator, bending transducer as a sensor, bending transducer system
  • Bending transducer as an actuator, bending transducer as a sensor, bending transducer system

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Embodiment Construction

[0051] Before the embodiments of the present invention will be described below, what consideration led the inventors to these embodiments is first explained. Of course, in the course of these explanations reference has been made to features of the embodiments described below which should also be transferable to these embodiments.

[0052] The nonlinearity of MEMS components has two origins: the construction of the electromechanical structure and its operating principle, the so-called static nonlinearity, and the dynamic behavior of the device, the so-called dynamic nonlinearity. Dynamic nonlinearity is the result of mechanical and / or electrical design features. Dynamic nonlinearities such as intermodulation, operating point shift, subharmonic resonances are often the result of static nonlinearities. Correction of existing dynamic nonlinearities is technically complex if it is at all practicable in a given situation.

[0053] The form of MEMS device considered here has at lea...

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Abstract

The invention relates to a bending transducer operated as an actuator, comprising a deflectable element, a micro-electromechanical transducer which extends along a centroidal line of the deflectable element and deflects the deflectable element in a first direction (161, 161b) when a first electrical signal is applied, and a second micro-electromechanical transducer which extends along the centroidal line and deflects the deflectable element in a second direction opposite the first direction when a second electrical signal is applied, wherein the centroidal line is located between sides of the first and the second micro-electromechanical transducers facing away from one another, and an electrical controller which is designed to modify the first electrical signal and the second electrical signal according to an input signal, such that a changing of the first electrical signal and a changing of the second electrical signal takes places in accordance with the electrical input signal, and the phases of the first and second electrical signals are shifted relative to one another. The invention also relates to a bending transducer operated as a sensor.

Description

technical field [0001] The present invention relates to a bending transducer, its use as an actuator or sensor, and a bending transducer system. Background technique [0002] Micromechanical devices (MEMS) are required to convert electrical signals into mechanical effects, ie in the case of actuators, or mechanical effects into electrical signals, ie in the case of sensors. For the purposes of this application, "effect" means, for example, the performance of work, and the application of associated deflections or bending moments. [0003] The linearity of the relationship between the electrical signal and the mechanical effects (transmission characteristics) of a microelectromechanical component is often subject to high demands. This applies, for example, to the use of such microelectromechanical components in microphones or loudspeakers. The non-linearity of the transfer characteristics adversely affects the accuracy with which the microelectromechanical component can fulf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00H02N1/00
CPCH02N1/006B81B3/0043B81B3/0021B81B3/0086B81B7/008
Inventor 赫尔曼·谢尔克伯特·凯瑟卢茨·埃里格
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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