Hollow cathode array discharge jet device
A hollow cathode and jet device technology, applied in chemical/physical/physical-chemical processes, chemical/physical/physical-chemical processes of applied energy, chemical instruments and methods, etc., can solve the problem of low discharge electron energy, poor plasma uniformity, Problems such as poor material treatment effect, to achieve the effect of good treatment effect, huge application potential and easy realization
Active Publication Date: 2021-08-03
NORTH CHINA ELECTRIC POWER UNIV (BAODING)
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Problems solved by technology
[0002] At present, in the field of material surface treatment, dielectric barrier (DBD) and atmospheric pressure jet discharge (APPJ) plasma sources are often used under high-frequency voltage, which require high operating frequency of the power supply, usually 10-50kHz, and the plasma uniformity generated by the discharge jet is poor. , only about 30-40%, and the discharge electron energy is low, about 0.1-1.0eV, it is difficult to destroy the relatively stable material molecular structure, and the material processing effect is poor
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[0024] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0025] The standard parts used in the present invention can be purchased from the market, and the special-shaped parts can be customized according to the instructions and the accompanying drawings. The specific connection methods of each part adopt mature bolts, rivets, welding in the prior art , pasting and other conventional means, no longer described in detail here.
[0026] Depend on Figure 1~2 It can be known from the illustrated embodiment that this embodiment includes a hollow cathode array electrode discharge generating device and a glow jet generating device;
[0027] The hollow cathode array electrode discharge generating device includes a high-voltage direct current power supply 3 and a hollow cathode array electrode 2, and the high-voltage direct current power supply 3 and the hollow cathode array electrode 2 supply powe...
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The invention discloses a hollow cathode array discharge jet device, and belongs to the technical field of material surface treatment. The hollow cathode array discharge jet device comprises a hollow cathode array electrode discharge generating device and a glow jet generating device. The glow jet generating device comprises a high-pressure air supply cavity, a low-pressure working cavity, a negative pressure generating device and a glow jet area control device; the high-pressure air supply cavity is provided with an adjustable air resistor and an electrode cathode side connecting port; the electrode cathode side connecting port is hermetically connected with the outer wall of the electrode bottom lining of the hollow cathode array electrode; the low-voltage working cavity is provided with an electrode anode side connecting port and a feeding port sealing door; the low-pressure working cavity is connected with the negative pressure generating device through a negative pressure pipe so as to generate negative pressure in the low-pressure working cavity; the electrode anode side connecting port is hermetically connected with the outer wall of the electrode bottom lining of the hollow cathode array electrode; the glow jet flow area control device enables the high-pressure air supply cavity to keep the given air pressure. The device can be applied to the field of material surface treatment and has the characteristics of good treatment effect, convenience in implementation and the like.
Description
technical field [0001] The invention relates to the technical field of material surface treatment. Background technique [0002] At present, in the field of material surface treatment, dielectric barrier (DBD) and atmospheric pressure jet discharge (APPJ) plasma sources are often used under high-frequency voltage, which require high operating frequency of the power supply, usually 10-50kHz, and the plasma uniformity generated by the discharge jet is poor. , is only about 30-40%, and the discharge electron energy is low, about 0.1-1.0eV, it is difficult to destroy the relatively stable material molecular structure, and the material treatment effect is poor. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a hollow cathode array discharge jet device, which can be applied to the field of material surface treatment, and has the characteristics of good treatment effect and easy realization. [0004] In order to solve ...
Claims
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Patent Timeline
Login to View More IPC IPC(8): B01J19/08
CPCB01J19/088B01J2219/0847B01J2219/0894
Inventor 黄世龙刘云鹏
Owner NORTH CHINA ELECTRIC POWER UNIV (BAODING)