Chip double-sided photoelectric characteristic comprehensive detection system and device
A photoelectric characteristic and comprehensive detection technology, which is applied in the direction of measuring device, electronic circuit test, optical instrument test, etc., can solve the problems of high cost, different functions and structures of inspection tools, and single function of the detection system, so as to achieve simple design work, High application range and cost-saving effect
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Embodiment 1
[0048] The air flotation base, sample adjustable fixture, front detection probe mechanism and back detection probe mechanism of this technology are modular mechanisms, which can be combined and assembled on the base, and the electrical characteristics of the chip can be tested and tested after assembly. detection. Its installation and use are flexible, and customers can choose to use and assemble it. It is not necessary to customize and design the corresponding detection mechanism every time different needs are required, the design work is simple and the cost is saved.
[0049] as attached figure 1 and 2 As shown, a chip double-sided photoelectric characteristic comprehensive detection system includes an air floating base 5, an adjustable sample fixture 4, a front detection probe mechanism 2 and a back detection probe mechanism 6, wherein:
[0050] The air-floating base 5 is used to use aerodynamic force as a mobile support to provide an air-floating force for the sample ad...
Embodiment 2
[0086] Based on the implementation of embodiment 1, in this embodiment, in order to facilitate the front detection probe mechanism 2 and the back detection probe mechanism 6 to carry out needle stick detection on the chip and microscopic observation of the structure of the chip, as attached figure 2 as shown,
[0087] A double-headed inverted microscopic detection mechanism 7 is also provided.
[0088] Preferably, it also includes a double-headed inverted microscopic detection mechanism 7, which is used to adjust the inverted double-headed microscope and drive the inverted double-headed microscope to perform surface microscopic observation and Needle stick test.
[0089]The double-headed inverted microscopic detection mechanism 7 includes an integrated double-sided microscope, which is in an inverted state, and is used to observe the front and back of the sample and realize needle pricking at the same time.
[0090] By moving the microscope base directly above the sample an...
Embodiment 3
[0096] A chip double-sided electronic characteristic detection device, including a kind of chip double-sided photoelectric characteristic comprehensive detection system described in the above embodiment 1 and / or embodiment 2; also includes a board base 1 and a gantry support 3, the gantry support 3 is vertically installed on the upper surface of the board base 1; the air float base 5 is fixed on the upper surface of the board base 1, and the front detection probe mechanism 2 and the back detection probe mechanism 6 are symmetrically fixed on the front side of the gantry support 3; The mechanism 8 is fixed on the board base 1 .
[0097] In order to install the chip double-sided photoelectric characteristic comprehensive detection system, hardware components are required to support and install the chip double-sided photoelectric characteristic comprehensive detection system.
[0098] as attached figure 2 and 4 As shown, the device also includes a board base 1 and a gantry bra...
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