Hybrid Integrated Optical Accelerometer Based on Michelson Interference

An accelerometer, hybrid integration technology, applied in the direction of measuring acceleration, velocity/acceleration/shock measurement, measuring device, etc., can solve the problems of small integration and commercialization of unfavorable accelerometers, achieve anti-electromagnetic interference environmental adaptability, avoid Coupling error between axes, the effect of high integration

Active Publication Date: 2022-03-25
ZHEJIANG UNIV
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AI Technical Summary

Problems solved by technology

Wavelength-sensitive accelerometers need to use high-precision spectrometers to detect changes in light wavelengths, which is not conducive to the small integration and commercialization of accelerometers, and is still in the laboratory research stage

Method used

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  • Hybrid Integrated Optical Accelerometer Based on Michelson Interference
  • Hybrid Integrated Optical Accelerometer Based on Michelson Interference
  • Hybrid Integrated Optical Accelerometer Based on Michelson Interference

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with drawings and embodiments.

[0041] Such as Figure 1-5 As shown, the present invention includes a narrow-linewidth light source 1, a speckle converter 2, an input waveguide 3, a first transverse strip groove 4, a first ball lens 5, a power recirculation mirror 6, and a second ball lens 7,2: 1 type Y waveguide 8, 1:2 type Y waveguide 9, second transverse strip groove 10, third ball lens 11, first F-P cavity input mirror 12, fourth ball lens 13, first upper electrode 14, first Lower electrode 15, first curved waveguide 16, longitudinal strip groove 17, fifth ball lens 18, spring vibrator structure 22, sixth ball lens 23, second curved waveguide 24, second upper electrode 25, second lower electrode 26 , the third transverse strip groove 27, the seventh ball lens 28, the second F-P cavity input mirror 29, the eighth ball lens 30, the photodetector 31, the lithium niobate single crystal thin film laye...

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Abstract

The invention discloses a hybrid integrated optical accelerometer based on Michelson interference. The light of the narrow line width light source of the present invention is coupled into the input waveguide after passing through the mode-spot converter, and realizes light splitting on the 2:1 type Y waveguide along the first transverse strip groove. The groove enters the first curved waveguide after passing through the third ball lens, the input mirror of the first F-P cavity and the fourth ball lens, and reflects on the rear surface of the mass block of the spring vibrator structure after passing through the fifth ball lens along the longitudinal strip groove Return according to the original path, the second light beam first enters the second curved waveguide along the third transverse strip groove, passes through the sixth ball lens along the longitudinal strip groove, and reflects on the front surface of the mass block of the spring vibrator structure according to the original path Returning, the two beams of light are coupled into the 1:2 Y-waveguide branch and then directly coupled into the photodetector. The invention has high detection sensitivity, compact structure, high integration, simple preparation process, high reliability, anti-electromagnetic interference and certain environmental adaptability.

Description

technical field [0001] The invention belongs to an optical accelerometer in the technical field of integrated optics and inertial sensing, in particular to a hybrid integrated optical accelerometer based on Michelson interference. Background technique [0002] In recent years, with the increasing maturity of microelectronics technology, integrated circuit technology and micromachining technology, MEMS accelerometers have received widespread attention due to their advantages of small size, light weight, low power consumption, high reliability, high sensitivity and easy integration. And it has developed rapidly, and has gradually replaced traditional mechanical sensors as the main force in miniature sensors. Limited by its resolution and dynamic range bottlenecks, MEMS accelerometers cannot be used in the field of high-precision inertial navigation and guidance. Under the urgent vision of developing new accelerometers, MOEMS accelerometers were born. [0003] MOEMS accelerome...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/093
CPCG01P15/093
Inventor 佘玄孙培基姚俊杰陈侃毕然黄腾超舒晓武
Owner ZHEJIANG UNIV
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