Working performance prediction and control method and system for vertical static pressure sliding table with variable oil film thickness

Abstract

The invention belongs to the technical field of static pressure sliding table control, and discloses a working performance prediction and control method and system for a vertical static pressure sliding table with variable oil film thickness. The method comprises the steps of: constructing a variable oil film thickness film type static pressure bearing design model considering the actual working condition to reflect the trace change of the oil film thickness; constructing a prediction model of the working performance of the vertical static pressure sliding table and an oil film thickness trace change prediction model integrating the bearing capacity, the static rigidity, the dynamic rigidity, the quick response time and the temperature influence of the static pressure sliding table; on the basis of the constructed model, determining the conditions for the vertical static pressure sliding table with the variable oil film thickness to reach the optimal working performance; and on the basis of the determined conditions, constructing a precision control model of the ultra-precision vertical static pressure sliding table based on the equivalent oil film thickness, the oil supply pressure, the oil sealing edge size and the flow ratio to control the vertical static pressure sliding table. The rigidity and vibration resistance of the static pressure sliding table can be effectively improved, the response time is shortened, and temperature fluctuation is reduced.

Description

technical field [0001] The invention belongs to the technical field of static pressure sliding table control, in particular to a method and system for predicting and controlling the working performance of a vertical static pressure sliding table with variable oil film thickness. Background technique [0002] At present: The oil film is the key to the hydrostatic bearing, and the change of the oil film thickness will directly affect the performance of the hydrostatic slide table. A reasonable estimation of the oil film thickness will help to provide a large load carrying capacity and excellent dynamic stiffness for the design of the hydrostatic guide rail and precise positioning accuracy. The shape error and deformation are the main factors affecting the oil film thickness. The change of oil film thickness and its control have an extremely important effect on the performance of the hydrostatic slide table, and it is the premise and guarantee for the ultra-precision hydrostat...

AI Technical Summary

Problems solved by technology

[0004] Through the above analysis, the existing problems and defects of the existing technology are: the existing method for predicting the working performance of the vertical static pressure sliding table is high in cost, time-consuming and cumbersome in calculation, and it is difficult to obtain the optimal design parameter combination; and the existing sliding table The control progress of the table control method is not high, and the controlled sliding table has low rigidity, poor motion accuracy, and poor stability

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