Temperature detection device and evaporation equipment
A technology of temperature detection device and temperature detection unit, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., and can solve problems such as inability to directly locate
Active Publication Date: 2021-09-07
BOE TECH GRP CO LTD +1
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- Application Information
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Problems solved by technology
[0005] The present application expects to provide a temperature detection device and evaporation equipment to solve the problem in the prior art that when the detected temperature indication fluctuates, it is impossible to directly locate whether the abnormality occurs in the temperature detection unit or in the temperature detection unit. Problems with the wires connected to the unit
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[0027] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.
[0028] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.
[0029] at least as figure 1 , figure 2 As described above, a temperature detection device shown in an embodiment of the present invention includes:
[0030] The first temperature detection unit 1 is configured to be arranged in the working chamber 9 where temperature measurement is required; fo...
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The invention discloses a temperature detection device and evaporation equipment. The temperature detection device comprises a first temperature detection unit, a second temperature detection unit, a measuring unit and a connection selection unit; the first temperature detection unit is used for being arranged in a working cavity needing temperature detection; the second temperature detection unit is used for being arranged outside the working cavity; the measuring unit is used for being arranged outside the working cavity and at least determining the detection temperature of the first temperature detection unit or the second temperature detection unit; and the connection selection unit is used for being arranged outside the working cavity and selectively electrically connecting the first temperature detection unit or the second temperature detection unit with the measuring unit through a connection wire. According to the temperature detection device, the connection selection unit can selectively electrically connect the first temperature detection unit or the second temperature detection unit with the measuring unit through the connection wire, so that whether an abnormality occurs in the temperature detection units or occurs in the wire connected with the temperature detection units can be positioned under the condition that the working cavity is not shut down.
Description
technical field [0001] The present invention generally relates to the technical field of vapor deposition equipment, in particular to a temperature detection device and vapor deposition equipment. Background technique [0002] Evaporation is a widely used vapor deposition technology, which has the advantages of simple film formation method, high film purity and compactness, and unique film structure and performance. For example, in the OLED (Organic Light-Emitting Diode; Organic Light-Emitting Diode) manufacturing process, the material in the working chamber (evaporation chamber) is vapor-deposited on the glass substrate or the corresponding adhesion layer through the evaporation equipment to complete the evaporation process. During the evaporation process, the temperature in the working chamber can reach 500°C to 1200°C. In order to monitor the temperature in the working chamber, thermocouples are installed in the working chamber for temperature detection. [0003] During ...
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IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/541
Inventor 李元星刘金彪肖昂罗楠晋亚杰胡斌加新星刘文豪周杰
Owner BOE TECH GRP CO LTD