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Coating equipment and its working method

A technology of coating equipment and working methods, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of high price and high maintenance cost, and achieve the advantages of improving utilization rate, reducing cost and increasing process time. Effect

Active Publication Date: 2022-04-19
JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, this PECVD coating equipment needs to invest in multiple pressure regulating valves and process pumps, which is expensive and requires high maintenance costs.

Method used

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  • Coating equipment and its working method
  • Coating equipment and its working method
  • Coating equipment and its working method

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Embodiment Construction

[0048] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0049] It should be noted that when an element is referred to as being “disposed on” another element, it may be directly on the other element or there may be another element in between. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or it may be present intervening with the other element. The terms "vertical," "horizontal," "left," "right," and similar expressions are used ...

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Abstract

The present application discloses a coating device and a working method thereof. The coating device includes a plurality of reaction chambers, and the plurality of reaction chambers are connected to the same process pump through the same pressure regulating valve; the working method includes: During the coating process using the plurality of reaction chambers, the conduction of the pressure regulating valve and the operation of the process pump are controlled so that the pressure in the plurality of reaction chambers is maintained at a first predetermined pressure; in response to the pressure regulation Before the valve fluctuates and the coating process in the plurality of reaction chambers starts or stops, after the pressure in the plurality of reaction chambers is increased to a second predetermined pressure, the conduction of the pressure regulating valve and the process are controlled. The pump operates to reduce the pressure in the plurality of reaction chambers to a third predetermined pressure; wherein the second predetermined pressure is greater than the first predetermined pressure and the third predetermined pressure. The application can make full use of resources, increase the utilization rate of pressure regulating valves and process pumps, and reduce costs.

Description

technical field [0001] The present application relates to the technical field of vacuum coating, in particular to a coating device and a working method thereof. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) refers to the plasma enhanced chemical vapor deposition method. Generally, for PECVD coating equipment in the photovoltaic industry, a furnace tube is connected to a process pump through a pressure regulating valve, and the pressure regulating valve and process pump are used to adjust the pressure in the reaction chamber of the furnace tube to make the reaction proceed smoothly. [0003] However, this PECVD coating equipment needs to invest in multiple pressure regulating valves and process pumps, which is expensive and requires high maintenance costs. Contents of the invention [0004] The technical problem mainly solved by this application is to provide a coating device and its working method, which can make full use of resources, im...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/455C23C16/50C23C16/52
CPCC23C16/45589C23C16/50C23C16/52
Inventor 杨明韩方虎韩明新张鹤
Owner JIANGSU MICROVIA NANO EQUIP TECH CO LTD
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