A self-calibration surface acoustic wave sensor and its calibration method

A surface acoustic wave and sensor technology, applied in the field of surface acoustic wave sensors, can solve problems such as the resonant frequency is susceptible to electromagnetic interference, and the surface acoustic wave sensor code capacity is small, so as to improve detection accuracy and reliability, avoid false detection, and improve The effect of code capacity

Active Publication Date: 2022-04-26
北京国声智能科技有限公司
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Problems solved by technology

[0006] The embodiment of the present invention provides a self-verifying surface acoustic wave sensor to solve the technical problems in the prior art that the resonant frequency of the wireless surface acoustic wave sensor is susceptible to electromagnetic interference and the code capacity of the surface acoustic wave sensor is small

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  • A self-calibration surface acoustic wave sensor and its calibration method
  • A self-calibration surface acoustic wave sensor and its calibration method

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Embodiment Construction

[0023] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] The technical solutions provided by various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] The self-verifying surface acoustic wave sensor includes a substrate 1, and a plurality of resonators with different frequencies and different sensing coefficients are arranged on the surf...

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Abstract

The invention discloses a self-verifying surface acoustic wave sensor, which includes a substrate, a reflective grid, an interdigital transducer and a sensor signal input and output sharing a port, adopts a single-port multi-channel integration mode, and each surface wave channel in the sensor is independent Working, each channel has independent input and output interdigital transducers and reflection grids, and each channel finally converges to a common input and output port. The invention integrates resonators with multiple channels on the same chip in a standard package shell, which can realize mutual verification between multiple resonators, so that the sensor can effectively eliminate interference signals, greatly improve the accuracy, and increase the code capacity of the sensor at the same time .

Description

technical field [0001] The invention relates to the field of surface acoustic wave sensors, in particular to a self-verifying surface acoustic wave sensor and a verification method thereof. Background technique [0002] The surface acoustic wave is an elastic wave transmitted on the shallow surface of a solid. When the voltage is applied to the electrode of the substrate material with piezoelectric properties, an acoustic wave will be formed on the surface of the piezoelectric crystal material. The surface acoustic wave is a piezoelectric wave An elastomechanical wave that propagates on the surface of a crystalline material and whose amplitude decreases rapidly with increasing depth into the substrate material. [0003] The physical structure of surface acoustic wave device mainly consists of three parts: interdigital transducer (IDT), substrate and reflection grid. The interdigital transducer is used to complete the exchange between the electromagnetic wave and the sound w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/48G01D18/00
CPCG01D5/48G01D18/00
Inventor 万仲飞
Owner 北京国声智能科技有限公司
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