All-optical integrated optomechanical microcavity structure with nonlinear mechanical oscillator

Abstract

The invention discloses an all-optical integrated optomechanical microcavity structure containing nonlinear mechanical oscillators, belonging to the field of micro-nano optoelectronic microcavity sensing. It includes a first micro-nano beam, a second micro-nano beam, a linear mechanical vibrator, a nonlinear mechanical vibrator and a measuring microdisk; the second micro-nano beam is fixedly connected to one side of the linear mechanical vibrator, and the second micro-nano beam is connected to the first micro-nano beam There is an air gap between the nano-beams; the nonlinear mechanical vibrator is connected in series on the other side of the linear mechanical vibrator, and a micro-nano probe is designed on the nonlinear mechanical vibrator. There is a first air slot between the micro-nano probe; the bottoms of the first micro-nano beam, the second micro-nano beam, the linear mechanical vibrator and the nonlinear mechanical vibrator are suspended in the air. The movable micro-nanobeam is designed in a nonlinear mechanical oscillator to realize the experimental study of the nonlinear optical-mechanical coupling characteristics of the optical-mechanical drive of the cavity integrated on the all-optical chip.

Description

technical field [0001] The invention relates to the technical field of micro-nano optoelectronic microcavity sensing, in particular to an all-optical integrated optomechanical microcavity structure containing nonlinear mechanical oscillators. Background technique [0002] An optomechanical microcavity is a micro-nano system designed based on the photon-phonon interaction of optical microcavity energy and mechanical microcavity energy, which is used to study the rich optical / mechanical resonance characteristics and light- mechanical coupling properties. The optical microcavity structure can confine the light field energy in the micro-nano-sized structure to achieve high optical resonance Q value, and the optical gradient force generated when the concentrated light field energy is applied to the semiconductor silicon material can make the microcavity structure itself displace . [0003] When this microcavity structure is applied to a mechanical oscillator supported by a cant...

AI Technical Summary

Problems solved by technology

These theoretical models have numerically solved and analyzed the optomechanical microcavity based on the nonlinear mechanical oscillator, and theoretically analyzed that the nonlinear mechanical oscillator will cause a large displacement of the optomechanical microcavity after being driven by a strong optical force. Nonlinear phenomena (such as photomechanical induced transparency, parametric photo-mechanical vibration, frequency synthesis of different mechanical oscillators, etc.), but have not yet been demonstrated from the experimental system

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