The invention discloses a piezoelectric
ceramic driving-based high-precision cavity
optical force micro
gyroscope, which comprises fixed columns, a mechanical structure, optical structures, piezoelectric ceramics and a base, the fixed columns are located at four corners of the mechanical structure, the optical structures are located at two ends of the mechanical structure, and the piezoelectric ceramics and the base are located at the lower part of the mechanical structure. The optical structure comprises a cavity light power
system and a
waveguide structure, the cavity light power
system is coupled with the
waveguide structure, the cavity light power
system is composed of a pair of optical microcavities, and the optical microcavities are a two-dimensional
photonic crystal or echo wall mode microcavity, a Fabry-Perot
optical microcavity and a one-dimensional nano
cantilever beam. The mechanical structure comprises
mass blocks and supporting beams, the
mass blocks comprise a core
mass block, a detection mass block and a driving mass block, the core mass block is located in the center of the
gyroscope and is connected with the driving mass block and the detection mass block through
cantilever arms, and the supporting beams comprise a driving supporting beam and a detection supporting beam.