A sensor
chip for detecting a presence of chemical, biochemical or
biological particles to be sensed in an
analyte fluid comprises at least one cavity extending from the back side of an
SOI substrate through its base and
buried oxide layers to
expose a back surface of the
silicon layer. At least one monolithically integrated lateral
photodiode comprises a lateral layer sequence of active
photodiode layers, forming an integral part of the exposed back surface defining a photosensor surface. A functionalized
coating either comprises a capturing agent, a preloaded capturing agent with labelled
analyte combination or is configured to immobilize a capturing agent upon
exposure of the surface functionalization layer to the capturing agent, for selectively capturing the particles to be sensed from an
analyte fluid upon
exposure of the functionalization layer to the analyte fluid. The
photodiode is sensitive to detect, upon capture of one or more of the particles to be sensed by the capturing agent, a characteristic
light emission or a characteristic change in
light emission from the surface functionalization layer in response to supplied excitation energy.