Adjustable optical resonance device and modulation method of adjustable optical resonance device

Abstract

The invention discloses an adjustable optical resonance device and a modulation method of the adjustable optical resonance device. The adjustable optical resonance device comprises a substrate, a first waveguide, a second waveguide, an optical resonator and a third waveguide, wherein the first waveguide, the second waveguide, the optical resonator and the third waveguide are attached to the substrate. The first waveguide and the second waveguide are arranged on one side of the optical resonator in sequence, and the third waveguide is arranged on the other side of the optical resonator. The contact surface between the first waveguide and the substrate and the contact surface between the second waveguide and the substrate are hollowed out; the sectional area of the second waveguide is larger than that of the first waveguide. Control light with power larger than the light power threshold value is input, as a result, the first waveguide deforms, the coupling coefficient of the optical resonator and the first waveguide is changed, and the extinction ratio and Q value of the resonance device are adjusted. According to the adjustable optical resonance device and the modulation method of the adjustable optical resonance device, the optical force effect of interaction between the waveguides is used for changing the coupling coefficient of the optical resonator and the waveguides to adjust the extinction ratio and Q value of the optical resonance device; the relation that the optical force effect increases along with increase of control light power is utilized, the magnitude of the power of the control light is changed to directly change deformation of the hollowed-out thin waveguides, and the adjustable optical resonance device is easy to realize and flexible in operation.

Description

technical field [0001] The invention belongs to the field of integrated photonics, and more specifically relates to an adjustable optical resonance device and a modulation method thereof. Background technique [0002] With the continuous development of microelectronics technology, the size of devices is getting smaller and closer to the physical limit of microelectronic devices. Optical interconnection is considered to be the most promising way to solve the bottleneck of electrical interconnection. Micro-nano optoelectronic integration is an essential way to commercialize optical interconnection. Therefore, in recent years, optical communication devices continue to develop in the direction of miniaturization and integration. [0003] Optical resonance devices are an important part of optoelectronic integrated circuits. In the field of integrated optoelectronics, optical resonant devices mainly include microring resonators, racetrack microring resonators, microdisk resonato...

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