The invention discloses a
silicon photon CIS sensor heterogeneous integration packaging structure and method. The method comprises the steps that 1) a
photon engine is prepared, an optical / electric
integrated circuit is integrated and vertically connected through a
copper needle, and a lens coupler is arranged at the optical input end; (2) a CIS
chip is inversely arranged on the first RDL layer through a micro-bump, a photosensitive area is hollowed out, a vertical
interconnection channel embedded with a first
copper column is formed by adopting a TIV technology, a CIS packaging layer is coated with a light-transmitting material, and an optical micro-mirror is integrated on one side of the CIS packaging layer; (3) preparing an ASIC
chip; 4) preparing an intermediate layer, and forming a second
copper column, an upper bonding pad and a lower bonding pad by adopting a TSV process; according to the invention, TIV, copper column
interconnection and CPO heterogeneous integration are combined, the reliability problem of a traditional TSV is overcome, high-bandwidth, low-power-consumption, miniaturized and high-performance packaging is realized, and the packaging structure is suitable for high-speed sensing and
data transmission scenes.