Silicon-based uniwafer photoelectricity integrated receiving chip for plastic optical fiber communication
A technology of optical fiber communication and optoelectronic integration, applied in optical fiber transmission, circuits, electrical components, etc., to achieve the effect of reducing cost, increasing bandwidth, and reducing junction capacitance
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[0030] The silicon-based monolithic optoelectronic integrated receiving chip described in the embodiment of the present invention is prepared by a 0.5 μm standard BCD process, and is equipped with a silicon-based photodetector and a preamplifier integrated circuit.
[0031] see figure 1 with 2 , the structure of the silicon-based photodetector and its manufacturing process are described as follows: First, the BN+ buried layer region is photolithographically etched on the high-resistance P-type silicon substrate 1, and the BN+ buried layer 2 and BP+ buried layer 2 are formed by ion implantation. Buried layer 3. N-EPI epitaxial layer 4 is grown on BN+buried layer 2 and BP+buried layer 3 . On the epitaxial layer 4, there are 11 N well regions with a distance of 14.6 μm and a width of 6.3 μm on the photolithography at equal intervals, and the 11 N wells are realized by ion implantation technology. Lithograph the P well area around the N wells 5 and 6, and use ion implantation ...
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