Optical mechanical microcavity structure containing nonlinear mechanical oscillator, measuring system and method

Abstract

The invention discloses an optical mechanical microcavity structure containing a nonlinear mechanical oscillator, a measuring system and a measuring method, and belongs to the field of micro-nano photoelectron microcavity sensing. In an optical mechanical micro-cavity formed by two one-dimensional photonic crystal micro-nano beams, a movable micro-nano beam is designed in a nonlinear mechanical oscillator; in addition, a micro-disk micro-cavity is used for monitoring the movement of a micro probe so as to realize the measurement of the displacement of the nonlinear mechanical oscillator; therefore, the experimental research of the nonlinear optical-mechanical coupling characteristic driven by cavity light force integrated on the all-optical chip is realized. Meanwhile, a coupling method based on two paths of micro-nano optical fibers and an optical microcavity is designed to be used for achieving optical-mechanical coupling pumping and displacement detection at the same time, wherein the all-optical detection system can effectively observe the nonlinear phenomenon in an optical-mechanical microcavity system. According to the invention, the design that a nonlinear mechanical oscillator is introduced into an optical mechanical microcavity is proposed for the first time, and meanwhile, the nonlinear phenomenon under the optical-mechanical coupling effect is observed through experimental measurement.

Description

technical field [0001] The invention relates to the technical field of micro-nano optoelectronic micro-cavity sensing, in particular to an opto-mechanical micro-cavity structure containing nonlinear mechanical oscillators, a measurement system and a method. Background technique [0002] An optomechanical microcavity is a micro-nano system designed based on the photon-phonon interaction of optical microcavity energy and mechanical microcavity energy, which is used to study the rich optical / mechanical resonance characteristics and light- mechanical coupling properties. The optical microcavity structure can confine the light field energy in the micro-nano-sized structure to achieve high optical resonance Q value, and the optical gradient force generated when the concentrated light field energy is applied to the semiconductor silicon material can make the microcavity structure itself displace . [0003] When this microcavity structure is applied to a mechanical oscillator supp...

AI Technical Summary

Problems solved by technology

These theoretical models have numerically solved and analyzed the optomechanical microcavity based on the nonlinear mechanical oscillator, and theoretically analyzed that the nonlinear mechanical oscillator will cause a large displacement of the optomechanical microcavity after being driven by a strong optical force. Nonlinear phenomena (such as photomechanical induced transparency, parametric photo-mechanical vibration, frequency synthesis of different mechanical oscillators, etc.), but have not yet been demonstrated from the experimental system

Images