Turning method for high-planeness annular large-diameter reflector

Abstract

The invention relates to a turning method for a high-planeness annular large-diameter reflector. The turning method comprises the following steps: S1, mounting a switching jig; S2, roughly machining the first surface of the reflector; S3, carrying out finish machining on the second face of the reflector; S4, performing compensation machining on the second surface of the reflector; S5, finishing the first surface of the reflector; S6, performing compensation machining on the first surface of the reflector; and S7, taking don and cleaning the reflective mirror. Through clamping and design of the switching jig, the two faces of the reflector can be machined, the corresponding precision can be guaranteed, and meanwhile the phenomenon that stress is not uniform in the machining process can be avoided; and according to the high-precision machining requirement of optical parts, on the basis of existing precision machining equipment, ultra-precision machining with the precision higher than that of a machine tool can be achieved through methods such as tool jig structure improvement, process optimization and specific compensation.

Description

technical field [0001] The invention relates to the processing and production of precision instrument components, in particular to a turning method of a high-flatness annular large-diameter reflector. Background technique [0002] In optics, the plane mirror is the only optical element that can form a perfect image. It does not change the concentric nature of the beam. After being reflected by the plane mirror, the divergent concentric beam is still a divergent concentric beam, and the converging concentric beam is still a converging concentric beam. [0003] At present, for the processing of optical parts with high flatness requirements, the method of grinding and polishing after grinding is usually selected. However, due to the large size of the parts and the characteristics of soft materials, this method is affected by the untimely chip removal and the precision of the equipment itself, so the actual precision of the machining cannot meet the design requirements (flatness...

AI Technical Summary

Problems solved by technology

However, due to the large size of the parts and the characteristics of soft materials, this method is affected by the untimely chip removal and the precision of the equipment itself, so the actual precision of the machining cannot meet the design requirements (the flatness requirement is 0.3um).

Grinding by manual or polishing equipment can meet the requirements of the mirror surface, but the efficiency is low

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