Semiconductor quartz part cleaning equipment

Abstract

The invention relates to semiconductor processing equipment, and discloses semiconductor quartz component cleaning equipment. The semiconductor quartz component cleaning equipment comprises a rack, a placing table rotationally installed on the rack and provided with a lifting opening in the center, an outer pipe wall cleaning device arranged on the rack and located on one side of the placing table, and an inner pipe wall cleaning device arranged in the rack in a lifting mode and located below the lifting opening, wherein the inner pipe wall cleaning device comprises a lifting table, a top sprayer and side sprayers, the top sprayer and the side sprayers are installed on the lifting table, the water outlet direction of the top sprayer faces the upper portion of the rack, the water outlet direction of the side sprayers faces the side of the rack, and the side sprayers are distributed on the two sides of the top sprayer. According to the semiconductor quartz component cleaning equipment, residual dirt on the quartz component can be taken away along with water flow in a flushing mode of top spraying water, so that the cleaning effect of the quartz component is greatly improved, and water spots are reduced.

Description

technical field [0001] The invention relates to the field of semiconductor processing equipment, in particular to a cleaning equipment for semiconductor quartz components. Background technique [0002] With the development of science and technology, semiconductor technology is a key research area for human beings at this stage. From small smart home appliances to medium-sized cars and ships, to aerospace and aerospace, all of them need to be applied to semiconductor technology. [0003] At present, the semiconductor that everyone refers to generally refers to chip manufacturing technology. In the chip manufacturing process, semiconductor epitaxy equipment, semiconductor diffusion equipment, etc. are needed, and some quartz components are used on these equipment, such as quartz boats. , Quartz tube, Quartz bracket, Quartz tank, etc. [0004] Before these quartz components are applied to semiconductor equipment, they need to be thoroughly cleaned to ensure good cleanliness, s...

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Problems solved by technology

[0006] In view of the above-mentioned related technologies, the inventor believes that there are the following defects: for sink immersion cleaning equipment, since the quartz parts need to be completely immersed in the cleaning liquid during cleaning, the dirt dissolved in the cleaning liquid will be removed when the quartz parts are taken out. Adhesion to the pipe wall, causing numerous water spots on the quartz parts after drying

For flushing cleaning equipment, during the flushing process, with the washing of water, the dirt attached to the quartz parts will be transferred, especially for flushing equipment with brushes, the dirt is particularly easy to stay on the brushes. In the process of scraping the quartz parts, the brush will transfer the dirt to the quartz parts, resulting in obvious water spots on the cleaned quartz parts after drying

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