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VCSEL linear array for multi-line laser radar

A linear array and multi-line laser technology, which is applied in the re-radiation of electromagnetic waves, radio wave measurement systems, and the use of re-radiation, can solve the problems of increasing the volume, weight and cost of multi-line laser radars, and reduce device costs. Realize The effect of increasing the number of lines and improving chip integration

Pending Publication Date: 2021-11-02
TAIYUAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for the application of multi-line lidar, the array beam of VCSEL still needs external beam adjustment, which increases the volume, weight and cost of multi-line lidar

Method used

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  • VCSEL linear array for multi-line laser radar
  • VCSEL linear array for multi-line laser radar
  • VCSEL linear array for multi-line laser radar

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Embodiment Construction

[0022] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail in combination with the embodiments and accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. The technical solutions of the present invention will be described in detail below in conjunction with the embodiments and drawings, but the scope of protection is not limited thereto.

[0023] For the application of unmanned laser radar, it aims to further improve the integration of laser radar and reduce the cost of laser radar. The technical solution of the present invention is to provide a VCSEL linear array for multi-line laser radar.

[0024] figure 1 It is a schematic diagram of the overall structure of a VCSEL linear array for multi-line lidar. Such as figure 1 ...

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Abstract

The invention relates to the technical field of laser detection and semiconductor optoelectronic devices, and in particular, relates to a VCSEL linear array for a multi-line laser radar. The VCSEL linear array specifically comprises a semiconductor substrate, m-element vertical cavity surface emitting lasers (VCSEL) in a linear array and m-element optical microlenses, the m-element VCSELs in a linear array are prepared on the front surface of the semiconductor substrate, and the m-element optical microlenses are arranged on the back surface of the semiconductor substrate in an array; the m-element VCSELs are mutually independent and output m paths of mutually incoherent laser signals; and the VCSELs are in one-to-one correspondence with the optical microlenses, and the optical microlenses are used for collimating laser emitted by the VCSELs corresponding to the optical microlenses and regulating and controlling the light emitting direction to form multi-line laser beams. According to the invention, collimation and light beam direction regulation and control of a VCSEL output laser beam are realized; and the optical scanning structure of the laser radar can be simplified, and the cost of the laser radar is reduced.

Description

technical field [0001] The invention relates to the technical field of laser detection and semiconductor optoelectronic devices, in particular to a vertical cavity surface emitting laser (VCSEL) linear array for multi-line laser radar. Background technique [0002] Unmanned driving technology is a cutting-edge technology that is about to change human life, and lidar plays an irreplaceable role in the development of unmanned driving technology. In recent years, a number of enterprises and scientific research institutions have done a lot of work on multi-line work, beam scanning and weight reduction of lidar, and have continuously met the requirements of unmanned driving for lidar. Especially in terms of multi-line work, commercial lidars with 64 or more lines have come out, and the number of lines of unmanned lidar has become an important indicator to measure its performance. [0003] At present, the widely used method to realize the multi-line operation of lidar is: use mul...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01S17/931G01S7/481
CPCG01S17/931G01S7/481
Inventor 贾志伟李丽王安帮赵彤李璞王龙生郭园园
Owner TAIYUAN UNIV OF TECH
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