The invention discloses a
semiconductor equipment control method, an engine and an equipment
control system, and relates to the technical field of control, and the method comprises the steps: reading a scene configuration file through a scene
loader, and carrying out the analysis to obtain scene model data; receiving an external
system message sent by a preset communication service in the
semiconductor equipment through a message
receiver, and analyzing the external
system message to obtain a message header parameter and a message body parameter; searching a process flow matched with the message header parameter from the scene model data or the process
context data through the message processor, and transmitting the process flow and the message body parameter to a process processor; and executing the logic of each component in the process flow through the process processor. According to the application, the
semiconductor equipment can be controlled to realize the service function through analysis of the semiconductor equipment control engine only by providing the scene configuration file containing the
relevant information of the standard execution process, the implementation efficiency of the
service process of the semiconductor equipment is improved, resource occupation is reduced, and the control reliability of the semiconductor equipment is improved.