Digital accelerometer based on liquid metal

Abstract

The invention discloses a digital accelerometer based on liquid metal. The digital accelerometer comprises three layers of structures from bottom to top, a first layer is a substrate which is provided with a plurality of longitudinally arranged electrode grooves which are symmetrically distributed on two sides of a longitudinal center line of the substrate, and two sections of signal electrodes which are not communicated are embedded in the electrode groove; a second layer is a functional structure layer, two V-shaped runners which are symmetrically distributed are arranged along the longitudinal center line, openings of the two V-shaped runners are oppositely arranged, and the two V-shaped runners are positioned above the two sections of signal electrodes which are not communicated with each other; a metal liquid drop limiting hole is formed in the center position of the two V-shaped flow channels, and liquid metal is contained in the metal liquid drop limiting hole; a third layer is a limiting cover plate, an air backflow channel is arranged on the lower surface, and part of the air backflow channel is communicated with the V-shaped flow channel; and the substrate, the functional structure layer and the limiting cover plate are respectively provided with fixing bolt holes which correspond up and down and are fixed through bolts. The accelerometer can directly output digital signals, omits a complex signal processing process, and is good in linearity, high in integration level and strong in anti-interference capability.

Description

technical field [0001] The invention relates to the technical field of accelerometers, in particular to a digital accelerometer based on liquid metal. Background technique [0002] Traditional inductive, piezoelectric, and capacitive acceleration sensors have disadvantages such as large volume, low sensitivity, poor linearity, and low frequency range. [0003] Most of the traditional accelerometers measure the acceleration by outputting analog signals into digital signals. During the conversion process of analog signals to digital signals, they need to be converted into digital signals through sampling, quantization and encoding, and the anti-interference of analog signals Weak. That is, a complex signal processing circuit is required to complete the output of the digital signal, resulting in an increase in the cost of the measurement unit. [0004] Traditional accelerometers output continuous analog signals, which cannot indicate the positions of values ​​1 and 0, and can...

AI Technical Summary

Problems solved by technology

[0002] Traditional inductive, piezoelectric, and capacitive acceleration sensors have disadvantages such as large volume, low sensitivity, poor linearity, and low frequency range.

[0003] Most of the traditional accelerometers measure the acceleration by outputting analog signals into digital signals. During the conversion process of analog signals to digital signals, they need to be converted into digital signals through sampling, quantization and encoding, and the anti-interference of analog signals Weak ability

That is, complex signal processing circuits are required to complete the output of digital signals, resulting in an increase in the cost of the measurement unit

[0004] Traditional accelerometers output continuous analog signals, which cannot indicate the positions of values ​​1 and 0, and can only be converted into digital signals through complex processes such as voltage transformation, rectification, sampling, filtering, and voltage stabilization, which increases the process cost, and Its sampling circuit is random, and local points represent the overall signal, which is easy to cause signal distortion and poor linearity

[0005] Therefore, in order to solve the shortcomings of traditional inductive, piezoelectric and capacitive acceleration sensors such as large volume, low sensitivity, poor linearity, and low frequency range, a liquid-based sensor that can directly convert acceleration into digital signal output is designed. The acceleration sensor of metal has become a technical problem that those skilled in the art need to solve urgently

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