High power automatic protection circuit based on mems microcantilever beam and graphene cpw transmission line
A micro-cantilever, automatic protection technology, applied in the field of microelectronics, can solve the problems of non-adaptive protection, large insertion loss, easy breakdown, etc., and achieve the effects of high reliability, low transmission loss, and not easy breakdown
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[0049] In this embodiment, the substrate material is GaAs, the thickness is 120 μm, the relative dielectric constant is 12.94, the width of the central signal line of the CPW transmission line is 58 μm, and the distance between the signal line and the first ground line and the second ground line is both 100μm, the width of the first ground wire and the second ground wire are both 200μm, the material of the signal wire and the ground wire is Au, the thickness is 2μm, and the characteristic impedance of the CPW transmission line is 50Ω. For MEMS, the width of the cantilever beam is 180 μm, the height of the anchor region is 3.6 μm, the thickness of the silicon dioxide layer is 2 μm, the relative dielectric constant of silicon dioxide is 3.9, the graphene is a single-layer graphene structure, and the relaxation time τ is 0.05 ps. The chemical potential of the initial state is 0 eV.
[0050] like Figure 4 Shown is the change curve of the transmission loss of CPW transmission lin...
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