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High power automatic protection circuit based on mems microcantilever beam and graphene cpw transmission line

A micro-cantilever, automatic protection technology, applied in the field of microelectronics, can solve the problems of non-adaptive protection, large insertion loss, easy breakdown, etc., and achieve the effects of high reliability, low transmission loss, and not easy breakdown

Active Publication Date: 2022-05-27
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This microwave solid-state reinforcement technology has disadvantages such as large insertion loss, easy breakdown under high power conditions, and inability to perform adaptive protection according to the input power.

Method used

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  • High power automatic protection circuit based on mems microcantilever beam and graphene cpw transmission line
  • High power automatic protection circuit based on mems microcantilever beam and graphene cpw transmission line
  • High power automatic protection circuit based on mems microcantilever beam and graphene cpw transmission line

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Embodiment

[0049] In this embodiment, the substrate material is GaAs, the thickness is 120 μm, the relative dielectric constant is 12.94, the width of the central signal line of the CPW transmission line is 58 μm, and the distance between the signal line and the first ground line and the second ground line is both 100μm, the width of the first ground wire and the second ground wire are both 200μm, the material of the signal wire and the ground wire is Au, the thickness is 2μm, and the characteristic impedance of the CPW transmission line is 50Ω. For MEMS, the width of the cantilever beam is 180 μm, the height of the anchor region is 3.6 μm, the thickness of the silicon dioxide layer is 2 μm, the relative dielectric constant of silicon dioxide is 3.9, the graphene is a single-layer graphene structure, and the relaxation time τ is 0.05 ps. The chemical potential of the initial state is 0 eV.

[0050] like Figure 4 Shown is the change curve of the transmission loss of CPW transmission lin...

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Abstract

The invention discloses a high-power automatic protection circuit based on a MEMS micro-cantilever beam and a graphene CPW transmission line. The graphene layer is arranged between the CPW central signal line and the ground line, and the MEMS micro-cantilever beam couples part of the signals on the transmission line. A control signal is generated according to the magnitude of the coupling power, and the control signal is loaded on the graphene layer. According to the electrical regulation characteristics of graphene, the control signal can change the chemical potential and conductivity of the graphene layer, and then change the transmission characteristics of the CPW transmission line. When the input power is less than the safety threshold, the chemical potential of graphene is zero, the conductivity is very small, the signal can be transmitted normally, and the transmission loss is small; when the input power exceeds the safety threshold, the control signal increases, and the graphene chemical potential and conductance The rate increases, which in turn changes the transmission characteristics of the CPW transmission line, and the output signal is greatly attenuated, which automatically protects the subsequent circuit. The invention has the advantages of small transmission loss in low power state, difficult breakdown in high power state, high reliability, and self-adaptive protection according to the magnitude of input power.

Description

technical field [0001] The invention belongs to the field of microelectronics, in particular to a high-power automatic protection circuit based on a MEMS micro-cantilever beam and a graphene CPW transmission line. Background technique [0002] The electromagnetic pulse energy emitted by the microwave transmitter will enter the system through the receiving equipment such as the antenna on the electronic system, resulting in serious interference, disturbance or even damage, especially the electromagnetic pulse coupled into the radio frequency channel through the antenna will destroy the sensitive device. Therefore, it is very important to set a high-power protection circuit at the back end of the receiving antenna to suppress the electromagnetic pulse voltage or current entering the electronic system and protect the sensitive modules in the circuit from damage. At present, the main method used for high-power protection is microwave solid-state reinforcement technology, that is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/66
CPCG01R21/02
Inventor 韩居正陈如山
Owner NANJING UNIV OF SCI & TECH
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