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High-power automatic protection circuit based on MEMS micro cantilever beam and graphene CPW transmission line

A micro-cantilever, automatic protection technology, applied in the field of microelectronics, can solve problems such as large insertion loss, easy breakdown, and inability to self-adaptive protection, and achieve the effects of small transmission loss, not easy to breakdown, and high reliability.

Active Publication Date: 2021-11-09
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This microwave solid-state reinforcement technology has disadvantages such as large insertion loss, easy breakdown under high power conditions, and inability to perform adaptive protection according to the input power.

Method used

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  • High-power automatic protection circuit based on MEMS micro cantilever beam and graphene CPW transmission line
  • High-power automatic protection circuit based on MEMS micro cantilever beam and graphene CPW transmission line
  • High-power automatic protection circuit based on MEMS micro cantilever beam and graphene CPW transmission line

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Embodiment

[0049] In this embodiment, the substrate material is GaAs, the thickness is 120 μm, the relative permittivity is 12.94, the width of the central signal line of the CPW transmission line is 58 μm, and the distance between the signal line and the first ground line and the second ground line is 100 μm, the width of the first ground wire and the second ground wire are both 200 μm, the material of the signal wire and the ground wire is Au, the thickness is 2 μm, and the characteristic impedance of the CPW transmission line is 50Ω. MEMS is a cantilever beam with a width of 180 μm, an anchor region height of 3.6 μm, a silicon dioxide layer thickness of 2 μm, a relative dielectric constant of silicon dioxide of 3.9, graphene as a single-layer graphene structure, and a relaxation time τ of 0.05 ps. The chemical potential of the initial state is 0eV.

[0050] Such as Figure 4 Shown is the variation curve of the transmission loss of the CPW transmission line with frequency under differ...

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Abstract

The invention discloses a high-power automatic protection circuit based on an MEMS micro-cantilever and a graphene CPW transmission line, a graphene layer is arranged between a CPW center signal line and a ground line, the MEMS micro-cantilever couples out a part of signals on the transmission line and generates a control signal according to the coupling power, the control signal is loaded to the graphene layer, and according to the electrical modulation characteristics of the graphene, the control signal can change the chemical potential and conductivity of the graphene layer, thereby changing the transmission characteristics of the CPW transmission line. When the input power is smaller than a safety threshold value, the chemical potential of graphene is zero, the conductivity is very small, signals can be transmitted normally, and the transmission loss is small; and when the input power exceeds a safety threshold value, the control signal is increased, and the chemical potential and the conductivity of the graphene are increased, so that the transmission characteristic of the CPW transmission line is changed, the output signal is greatly attenuated, and a subsequent circuit is automatically protected. The invention has the advantages of low transmission loss in a low-power state, difficulty in breakdown under a high-power condition, high reliability, capability of performing self-adaptive protection according to the magnitude of input power and the like.

Description

technical field [0001] The invention belongs to the field of microelectronics, in particular to a high-power automatic protection circuit based on a MEMS micro-cantilever beam and a graphene CPW transmission line. Background technique [0002] The electromagnetic pulse energy emitted by the microwave transmitter will enter the system through the receiving equipment such as the antenna on the electronic system, causing serious interference, disruption or even damage, especially the electromagnetic pulse coupled into the radio frequency channel through the antenna will damage sensitive devices. Therefore, it is very important to set up a high-power protection circuit at the back end of the receiving antenna to suppress the electromagnetic pulse voltage or current entering the electronic system, and to protect sensitive modules in the circuit from damage. The main method currently used for high-power protection is microwave solid-state reinforcement technology, which reduces th...

Claims

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Application Information

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IPC IPC(8): G01R21/02
CPCG01R21/02
Inventor 韩居正陈如山
Owner NANJING UNIV OF SCI & TECH
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