High-power automatic protection circuit based on MEMS micro cantilever beam and graphene CPW transmission line
A micro-cantilever, automatic protection technology, applied in the field of microelectronics, can solve problems such as large insertion loss, easy breakdown, and inability to self-adaptive protection, and achieve the effects of small transmission loss, not easy to breakdown, and high reliability.
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[0049] In this embodiment, the substrate material is GaAs, the thickness is 120 μm, the relative permittivity is 12.94, the width of the central signal line of the CPW transmission line is 58 μm, and the distance between the signal line and the first ground line and the second ground line is 100 μm, the width of the first ground wire and the second ground wire are both 200 μm, the material of the signal wire and the ground wire is Au, the thickness is 2 μm, and the characteristic impedance of the CPW transmission line is 50Ω. MEMS is a cantilever beam with a width of 180 μm, an anchor region height of 3.6 μm, a silicon dioxide layer thickness of 2 μm, a relative dielectric constant of silicon dioxide of 3.9, graphene as a single-layer graphene structure, and a relaxation time τ of 0.05 ps. The chemical potential of the initial state is 0eV.
[0050] Such as Figure 4 Shown is the variation curve of the transmission loss of the CPW transmission line with frequency under differ...
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