Machining clamp for ultra-pure tantalum ring for semiconductor manufacturing and method and application thereof
A technology for semiconductors and fixtures, applied in the direction of chucks, etc., can solve the problems of high-purity tantalum rings, high precision, chuck size, fine-tuning, etc., to improve quality and resource utilization, and broaden the scope of use , high-precision effects
Inactive Publication Date: 2021-11-26
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology
[0007] Although the above documents have improved the structure of different aspects of the processing fixture, the effect achieved is only to improve the clamping force of the fixture, and it is impossible to fine-tune the size of the chuck in the fixture, nor can it achieve the high-purity tantalum ring. The high precision required for processing is not suitable as a processing fixture for ultra-high-purity tantalum rings for semiconductor manufacturing
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[0040]It should be understood that in the description of the present invention, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, a feature defined as "first", "second"...
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The invention provides a machining clamp for an ultra-pure tantalum ring for semiconductor manufacturing and a method and application thereof. The machining clamp comprises an expanding assembly and an adjusting assembly mechanically connected with the expanding assembly, the expanding assembly comprises a chuck and chuck jaws, the chuck jaws internally support the chuck, and a workpiece to be machined is arranged on the periphery of the chuck in a sleeving manner; The adjusting assembly comprises a tooth sleeve and a threaded rod, one end of the tooth sleeve is tightly attached to the ends, away from the chuck, of the chuck jaws, and the end, away from the chuck jaws, of the tooth sleeve is in threaded connection with the threaded rod. The threaded rod is rotated to drive the tooth sleeve to move, so that the expanding degree of the chuck jaws to the chuck is regulated and controlled. According to the machining clamp for the ultra-pure tantalum ring for semiconductor manufacturing, the size of the chuck can be precisely adjusted and controlled, the machining clamp is suitable for high-purity tantalum rings of different sizes, the high precision of machining of the high-purity tantalum rings is guaranteed, and the quality of machined finished products is improved.
Description
technical field [0001] The invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a processing fixture for an ultra-high-purity tantalum ring used in semiconductor manufacturing, as well as a method and application thereof. Background technique [0002] Semiconductor technology refers to the technical semiconductors that use semiconductors as materials to make components and integrated circuits, including wafer growth technology, thin film deposition, photolithography, etching, doping technology and process integration, etc., and high-purity tantalum rings for semiconductors When processing, it needs to be fixed by a jig, so that photolithography and etching can be performed. [0003] At present, when the high-purity tantalum ring is fixed by a common jig, it is impossible to fine-tune the chuck in the jig and cannot adapt to the processing conditions of high-purity tantalum rings of different sizes, which has great limitations....
Claims
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IPC IPC(8): B23B31/10
CPCB23B31/102B23B31/101
Inventor 姚力军潘杰王学泽黄引驰陈雄威张勇
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD