Transmission, double linkage and anti-sway anti-fall device, crane system and wafer handling method

Abstract

The invention provides a transmission, double linkage and anti-sway anti-falling device, a crane system and a wafer transportation method, which are applied in the field of automatic control technology, and more specifically relate to semiconductor manufacturing technology. The transmission device includes a mounting plate, a motor, The first bearing seat, the second bearing seat, the coupling, the rotating shaft, the cam and the cam follower. The motor, the first bearing seat and the second bearing seat are installed on the mounting plate. The rotating shaft is supported on the first bearing seat and the second bearing seat. Between the two bearing seats, a cam is set on the rotating shaft, and a cam groove is provided on the cam to install a cam follower. The output shaft of the motor drives the rotating shaft through a coupling, and one end of the cam follower is connected to the linkage mechanism. Under the driving of the motor, one end of the cam follower connected to the linkage mechanism is limited to move in the same plane to drive the linkage mechanism. Driven by a single motor, it has a simple mechanism, small size and light weight, and can be flexibly used in wafer handling scenarios in semiconductor manufacturing.

Description

technical field [0001] The invention belongs to the technical field of automatic control, more precisely relates to semiconductor manufacturing technology, and in particular to a transmission, double linkage and anti-sway anti-falling device, a crane system and a wafer handling method. Background technique [0002] Crane systems are often used to transport wafers in semiconductor manufacturing. On the one hand, the wafer is relatively fragile and requires high stability during transportation. For example, it is usually required that the vibration acceleration during wafer transportation is not greater than 0.5g. On the other hand, wafer production costs are relatively high, and if a drop occurs at this time, it will inevitably cause loss of personnel, equipment and products. Therefore, the anti-fall mechanism and anti-vibration mechanism of the crane system are extremely necessary. [0003] At present, in order to prevent wafers from shaking and falling during transportati...

AI Technical Summary

Problems solved by technology

[0003] At present, in order to prevent wafers from shaking and falling during transportation, the existing crane system needs to use two sets of independent auxiliary mechanisms to prevent shaking and falling respectively, and each set of independent auxiliary mechanisms needs to be driven by its own control motor, not only the auxiliary mechanism Complicated, the equipment is bulky, takes up a lot of space, and the weight of the equipment is heavy, which increases the burden on the overhead track keel in the crane system

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