Small hole throttling static pressure thrust gas bearing with accompanying throttling holes

Abstract

The invention discloses a small hole throttling static pressure thrust gas bearing with accompanying throttling holes, and relates to gas bearings. An air inlet cavity of the bearing is formed in the normal direction of a thrust surface of a bearing body. A main throttling hole and the multiple accompanying throttling holes are connected to the tail end of the air inlet cavity, and the main throttling hole is parallel to the axis of the air inlet cavity. The axes of the accompanying throttling holes are circumferentially and uniformly distributed on the circumference which is away from the axis of the main throttling hole by a distance R. The axes of the accompanying throttling holes are parallel to the axis of the main throttling hole. A pressure cavity vertically communicates with the tail ends of the main throttling hole and the tail ends of the accompanying throttling holes, and the pressure cavity and the main throttling hole are coaxial. The flow of the main throttling hole vertically impacts on the bearing surface to provide main bearing force, along with generation of a large-scale vortex structure in the pressure cavity, the flow of the accompanying throttling holes around the main throttling hole vertically rushes into the pressure cavity, the vortex structure is damaged, the vortex scale is reduced, vortex development is restrained, the internal and external pressure difference of vortexes is reduced, and micro-vibration of the bearing is reduced. The working stability of the bearing is improved.

Description

technical field [0001] The application relates to the field of gas bearings, in particular to a small-hole throttling static pressure thrust gas bearing with accompanying throttling holes. Background technique [0002] Gas bearings are widely used in precision and ultra-precision machining equipment because of their high speed, precision, low friction, high temperature resistance, long life, simple structure, no pollution or less pollution. Although gas bearings have higher load-carrying capacity and stiffness. However, with the continuous improvement of precision requirements in the field of ultra-precision machining, micro-vibration phenomena that have a significant impact on the precision of gas bearings can no longer be ignored. [0003] The following is an example of the small-hole throttle static pressure gas bearing in the gas bearing: the pressure chamber of the small-hole throttle static pressure gas bearing is an important part, which can improve the bearing capac...

AI Technical Summary

Problems solved by technology

When the working accuracy and positioning accuracy of ultra-precision equipment are close to the nanometer or even sub-nanometer level, the impact of this micro-vibration will seriously affect the bearing working accuracy

When there is external energy input, this micro-vibration will be rapidly amplified, thus affecting the working stability of the entire system

[0004] Therefore, it is urgent to develop a new gas bearing that can solve the problem of bearing microvibration caused by the large-scale vortex structure in the pressure chamber.

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