A Small Orifice Throttle Hydrostatic Thrust Gas Bearing with Accompanying Orifice

Abstract

The application discloses a small hole throttling static pressure thrust gas bearing with accompanying throttling holes, relating to the gas bearing. The air inlet chamber of the bearing is opened along the normal direction of the thrust surface of the bearing main body. The main throttling hole and multiple accompanying throttling holes are connected to the end of the intake cavity, and the main throttling hole is parallel to the axis of the intake cavity. The axis of the accompanying orifice is evenly distributed on the circumference at a distance R from the axis of the main orifice. The axis of the companion orifice is parallel to the axis of the main orifice. The pressure chamber is vertically communicated with the end of the main orifice and the accompanying orifice, and the pressure chamber is coaxial with the main orifice. The flow of the main orifice vertically impacts on the bearing surface to provide the main bearing capacity. Along with the generation of large-scale vortex structure in the pressure chamber, the flow of the accompanying orifice around the main orifice rushes into the pressure chamber vertically and destroys the vortex structure. Reduce the size of the vortex, inhibit the development of the vortex, and then reduce the pressure difference between the inside and outside of the vortex, reduce the micro-vibration of the bearing, and then improve the working stability of the bearing.

Description

technical field [0001] The application relates to the field of gas bearings, in particular to a small-hole throttling static pressure thrust gas bearing with accompanying throttling holes. Background technique [0002] Gas bearings are widely used in precision and ultra-precision machining equipment because of their high speed, precision, low friction, high temperature resistance, long life, simple structure, no pollution or less pollution. Although gas bearings have higher load-carrying capacity and stiffness. However, with the continuous improvement of precision requirements in the field of ultra-precision machining, micro-vibration phenomena that have a significant impact on the precision of gas bearings can no longer be ignored. [0003] The following is an example of the small-hole throttle static pressure gas bearing in the gas bearing: the pressure chamber of the small-hole throttle static pressure gas bearing is an important part, which can improve the bearing capac...

AI Technical Summary

Problems solved by technology

When the working accuracy and positioning accuracy of ultra-precision equipment are close to the nanometer or even sub-nanometer level, the impact of this micro-vibration will seriously affect the bearing working accuracy

When there is external energy input, this micro-vibration will be rapidly amplified, thus affecting the working stability of the entire system

[0004] Therefore, it is urgent to develop a new gas bearing that can solve the problem of bearing microvibration caused by the large-scale vortex structure in the pressure chamber.

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