Ellipsoid reflector position adjusting device and method
An adjustment method and a technology of an adjustment device, which are applied in the field of photolithography, and can solve the problems of low position adjustment accuracy and complicated adjustment process of an ellipsoid mirror
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[0025] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0026] In the prior art, in order to obtain a uniform illumination source for lithography, it is necessary to reflect the light emitted by the light source through an ellipsoidal reflector in the lamp chamber to form a uniform light cone. In order to adjust the light cone in the lamp house to the tolerance range, it is necessary to adjust the ellipsoidal reflector and the structures in the lamp house at the same time, requiring more adjustment mechanisms, the more complicated the adjustment process, the greater the...
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