Ellipsoid reflector position adjusting device and method

An adjustment method and a technology of an adjustment device, which are applied in the field of photolithography, and can solve the problems of low position adjustment accuracy and complicated adjustment process of an ellipsoid mirror

Active Publication Date: 2021-12-03
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

[0005] The embodiment of the present invention provides an ellipsoidal reflector position adjustment device and adjustment method to solve the problem of low accuracy and complicated adjustment process of the ellipsoidal reflector

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  • Ellipsoid reflector position adjusting device and method
  • Ellipsoid reflector position adjusting device and method
  • Ellipsoid reflector position adjusting device and method

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Embodiment Construction

[0025] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0026] In the prior art, in order to obtain a uniform illumination source for lithography, it is necessary to reflect the light emitted by the light source through an ellipsoidal reflector in the lamp chamber to form a uniform light cone. In order to adjust the light cone in the lamp house to the tolerance range, it is necessary to adjust the ellipsoidal reflector and the structures in the lamp house at the same time, requiring more adjustment mechanisms, the more complicated the adjustment process, the greater the...

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Abstract

The invention discloses an ellipsoid reflector position adjusting device and method. The ellipsoid reflector position adjusting device comprises an internal focusing telescope, a light receiving screen, a light source, a light source calibration plate, a lamp chamber position calibration plate, a lamp chamber reference fixing plate and a five-dimensional adjusting mechanism. The lamp chamber reference fixing plate is located on the optical platform, and the lamp chamber position calibration plate is fixed on the lamp chamber reference fixing plate; the five-dimensional adjusting mechanism is located on the upper side of the lamp chamber position calibration plate; the light source calibration plate is positioned on the upper side of the five-dimensional adjusting mechanism; the light receiving screen is positioned above the light source; the internal focusing telescope adjusts the marking center of the light source, the marking center of the lamp chamber position calibration plate and the marking center of the light receiving screen to the same optical axis; and the five-dimensional adjusting mechanism adjusts the ellipsoid reflector, so that the light source is located at the actual first focus of the ellipsoid reflector, and the mark center of the light receiving screen is located at the actual second focus of the ellipsoid reflector. According to the technical scheme provided by the invention, the problems of low position adjustment precision and complex adjustment of the ellipsoidal reflector are solved.

Description

technical field [0001] The invention relates to the field of photolithography technology, in particular to an ellipsoid mirror position adjustment device and adjustment method. Background technique [0002] Ellipsoidal reflectors are widely used in the field of lighting. In high-tech applications such as projection objective lithography machines that use mercury lamp lighting, higher illumination and uniformity of illumination are required, and the design and assembly of ellipsoidal reflectors are highly demanding. Accuracy requirements. [0003] Generally, for the mercury lamp chamber of a lithography machine, the light emitted by the mercury lamp passes through the above-mentioned ellipsoidal reflector and plane reflector and then projects to the light-emitting side to form a light cone, which is used as an illumination source. However, the external interface of the light cone relative to the lamp house needs to meet a certain eccentricity and inclination angle, so as to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/62G03F7/20
CPCG02B27/62G03F7/70833
Inventor 刘风秀
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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