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Substrate conveying unit of heat treatment device

A heat treatment device and substrate transfer technology, applied in electrical components, conveyor objects, transportation and packaging, etc., can solve problems such as cost loss, defect, damage, etc., to achieve manufacturing yield, high-quality manufacturing yield, ensure high temperature The effect of durability

Pending Publication Date: 2021-12-07
韩国捷太格特热处理设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] When the transfer unit comes into contact with the glass substrate, if the glass substrate is flawed, it will be judged as a defective product when manufacturing the display, which will cause a loss in cost
[0011] If the impact cannot be absorbed and friction occurs during the transportation or loading and unloading of the glass substrate, the coating surface of the glass substrate will have spots including scratches, and the glass substrate will be subjected to local thermal stress, resulting in defects or defects in the next process. Even a slight impact will break

Method used

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  • Substrate conveying unit of heat treatment device
  • Substrate conveying unit of heat treatment device
  • Substrate conveying unit of heat treatment device

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Embodiment Construction

[0050] Hereinafter, the specific content of the substrate transfer unit of the heat treatment apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

[0051] The term "heat treatment device" used in the description of the present invention may be used interchangeably with "LCD glass coking chamber". "Substrate" can be used interchangeably with "glass substrate".

[0052] figure 1 It is an example for explaining the heat treatment device.

[0053] Such as figure 1 As shown, the heat treatment apparatus 100 includes a chamber 110 provided with a heater 200, and has a function of heating or drying the substrate GL by injecting reactive process gas.

[0054]One side of the chamber 110 has an input port 111 for passing a substrate GL such as an organic light-emitting display device or an LCD glass substrate (hereinafter referred to as "substrate GL" or "substrate") that needs to be heated and dried. ...

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PUM

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Abstract

The invention relates to a substrate conveying unit of a heat treatment device. The present invention comprises: a heat treatment device comprising a chamber in which a heater is mounted and arranged, and a plurality of racks provided across the surface of the heater inside the chamber; and universal balls which are disposed at appropriate positions so as to protrude along the surface of the rack, and guide the conveyance and loading / unloading of the substrate before and after the heat treatment by the heat treatment device.

Description

technical field [0001] The present invention relates to a substrate transfer unit of a heat treatment device that is mounted on a rack of the heat treatment device and used for heat treatment or transfer of a glass substrate. Background technique [0002] Organic light-emitting display devices and flat-panel displays such as LCDs are used in various image devices such as TVs, mobile phones, and monitors. Recently, in the field of flat-panel display manufacturing, efforts are being made to improve equipment to improve performance and profitability. The performance of oven chambers used in the manufacturing process of flat panel displays has been continuously improved. [0003] For example, flat panel displays such as thin film transistor liquid crystal displays (Thin Film Transistor Liquid Crystal Display, TFT LCD) are deposited on a glass substrate through a thin film deposition process, a photoresist coating process, a baking process, etc. (Baking) process, exposure proces...

Claims

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Application Information

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IPC IPC(8): B65G49/06H01L21/677
CPCH01L21/67706B65G49/067
Inventor 卢炯来中西识金镇龙金珉哲河在昱
Owner 韩国捷太格特热处理设备有限公司