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Assembling and adjusting device and method for off-axis beam shrinking optical system

An optical system, off-axis technology, applied in the direction of optics, optical components, instruments, etc., to achieve high adjustment accuracy, improve assembly efficiency, and simple installation

Pending Publication Date: 2021-12-10
CHANGCHUN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the present invention aims to propose an adjustment device and adjustment method for off-axis beam shrinking optical systems, which solves the difficulty of traditional adjustment devices and methods for off-axis optical systems in ensuring that the mirror chamber can be installed on the main Under the premise of the framework, improve the efficiency of assembly and adjustment, and the problem of mass production

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  • Assembling and adjusting device and method for off-axis beam shrinking optical system
  • Assembling and adjusting device and method for off-axis beam shrinking optical system
  • Assembling and adjusting device and method for off-axis beam shrinking optical system

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Embodiment Construction

[0052] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0053] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0054] Such as Figure 1-Figure 6 As shown, an assembly and adjustment device for an off-axis attenuation optical system includes a ZYGO interferometer 1, an off-axis attenuation assembly and adjustment subsystem 2, an off-axis attenuation optical system 3, an azimuth and pitch table 4, and a reference mirror 5;

[0055] The off-axis narrowing optical system 3 includes an off-axis secondary mirror chamber 32, an off-axis secondary mirror 33, a main frame 34, an off-axis primary mirror 35 and an off-axis primary mirror chamber 37, and the off-axis primary mirror 35 is installed In the off-axis primary mirror chamber 37, the off-axis secondary mirror 33 is installed in the off-axis second...

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Abstract

The invention provides an assembling and adjusting device and method for an off-axis beam shrinking optical system. The device comprises a ZYGO interferometer, an off-axis beam shrinking assembling and adjusting subsystem, an off-axis beam shrinking optical system, an azimuth pitching table and a reference reflector, wherein the off-axis beam shrinking optical system comprises an off-axis secondary mirror chamber, an off-axis secondary mirror, a main frame, an off-axis primary mirror and an off-axis primary mirror chamber, the main frame is fixed on the azimuth pitching table, the off-axis beam shrinking assembling and adjusting subsystem comprises a side surface tool and a front surface tool, the side surface tool drives the front surface tool to do translational motion, the front surface tool drives the off-axis secondary mirror to do rotation, pitching motion and translational motion, the ZYGO interferometer is located in front of the off-axis primary mirror, the reference reflector is located in front of the off-axis secondary mirror, and emergent light of the ZYGO interferometer coincides with a light inlet in the main frame. According to the invention, the problem that it is difficult to improve the adjustment efficiency and achieve batch production on the premise that it is guaranteed that a main frame can be installed on a mirror chamber for an off-axis optical system through a traditional assembling and adjusting device and method is solved.

Description

technical field [0001] The invention belongs to the technical field of optical adjustment, and in particular relates to an adjustment device and an adjustment method for an off-axis shrinkage optical system. Background technique [0002] With the development of optical technology, the off-axis beam reduction optical system has become more and more mature. In the optical system, the factor that has a great influence on the imaging quality and beam transmission quality is the surface shape of the mirror used. By default, when the processing of the mirror is qualified, the link that has the greatest impact on the image quality of the entire optical system is the adjustment accuracy of the optical system. In the process of assembling and adjusting, unlike the widely used off-axis plane reflector, it is more difficult to assembling and adjusting the off-axis parabolic mirror, which is mainly reflected in the many degrees of freedom in the process of assembling and adjusting, and...

Claims

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Application Information

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IPC IPC(8): G02B27/62
CPCG02B27/62
Inventor 李响孙梓庭宋延嵩高亮安岩董岩
Owner CHANGCHUN UNIV OF SCI & TECH
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