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Automatic wafer positioning device

An automatic positioning and wafer technology, which is used in fine working devices, stone processing equipment, manufacturing tools, etc., can solve the problems of inaccurate positioning of the device, inability to process multiple wafers, and high use limitations, and achieve the effect of ensuring sealing.

Pending Publication Date: 2021-12-21
钟兴进
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] An existing automatic positioning and cutting machine for silicon wafers is found in use. The positioning of the device is not accurate, the device has no protective effect on the wafer when the device is positioned, the device does not have a preheating effect, and the processing of the wafer is unstable. Unstable, unable to process multiple wafers at the same time, resulting in high limitations in its use

Method used

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  • Automatic wafer positioning device
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Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0027] see Figure 1-4 , an automatic wafer positioning device, comprising a working box 1, a controller 2 is fixed above the working box 1, a cavity 3 is arranged in the working box 1, and a first electric slideway is fixed above the cavity 3 4. The first electric slide 4 is connected to the controller 2, the first electric slide 4 is provided with a first slider 5, and the first slide 5 is fixed with a first motor 6 , the first motor 6 is connected to one e...

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Abstract

The invention relates to an automatic wafer positioning device. The automatic wafer positioning device comprises a working box, a controller is fixed above the working box, a cavity is formed in the working box, a first electric slide way is fixed above the cavity and connected with the controller, a buffer pad is fixed in a protective net, a sealing ring is fixed on a suction cup, and a machining platform is fixed in the working box and arranged on the peripheral side of the suction cup, heating pieces are fixed to the lower portions of the two sides of the cavity, and the heating pieces are connected with the controller. The automatic wafer positioning device can be used for positioning and machining multiple sets of wafers at the same time, has a preheating effect and is stable in wafer machining; and a filter is arranged in the device and can adsorb gas in a box body, the device is provided with a safety door, the sealing performance of the working box is guaranteed, and the working condition in the working box can be observed through an observation window.

Description

technical field [0001] The invention relates to the technical field of wafer production equipment, in particular to an automatic wafer positioning device. Background technique [0002] As we all know, the existing wafer positioning device is an auxiliary device for wafer positioning, which has been widely used in the field of wafer production equipment. [0003] For example, the publication number is "CN205416057U", and the patent title is: "A kind of automatic positioning and cutting machine for silicon wafers". A pole is arranged on the frame, the upper end of the pole is connected with a slide rail, the lower end of the slide rail is provided with a knife mount, and a driving motor is arranged on the knife mount, and the distance between the knife mount and the slide rail is A pulley is provided, and a rotary table is provided at the lower end of the knife holder, and two cutting blades are connected to the rotary table, an infrared sensor is provided in the middle of th...

Claims

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Application Information

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IPC IPC(8): B28D5/00
CPCB28D5/0058B28D5/0082B28D5/0076
Inventor 钟兴进
Owner 钟兴进
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