Advanced intelligent device control system for ion implanter

Abstract

The invention provides an advanced intelligent device control system for an ion implanter, and the system is characterized in that the system comprises a remote control module which remotely controls a machine through an RCM, a data acquisition module which is used for collecting parameters and state parameters of current-layer and previous-layer machine equipment and collecting current-layer and previous-layer process parameters at the same time, an analysis feedback module which is used for adjusting a feedback equation and feeding back the received adjustment mode information to the remote control module, and an intelligent adjustment module which is used for analyzing current-layer and previous-layer machine equipment parameters and process parameters by utilizing iDEP, drawing up an algorithm, finding out key factors and then feeding back an adjustment mode to the analysis feedback module. Labor can be saved, and the production time of a machine can be prolonged.

Description

technical field [0001] The invention relates to an advanced intelligent device control system for an ion implanter, belonging to the field of chip manufacturing. Background technique [0002] The ion implantation machine needs to adjust the ion beam beam according to the needs of different products. Generally, when the adjustment is performed, it is necessary to manually assist the machine to define, then the machine performs automatic adjustment, and finally executes the machine test. Confirm that the adjustment process takes a lot of time, resulting in loss of production capacity. [0003] There are many variables that affect the output process level of ion implantation machines, including the capacity of the previous process machine, the status of the machine equipment at the current station, and the process parameters at the current station. When operating manually, it is easy to cause errors or omissions or the same impact when considering the variables. sex. Content...

AI Technical Summary

Problems solved by technology

[0002] The ion implanter needs to adjust the ion beam beam in response to the needs of different products. Generally, when the adjustment is performed, it is necessary to manually assist the machine to define, then the machine performs automatic adjustment, and finally executes the machine test. Confirmation, the adjustment process takes a lot of time, resulting in loss of production capacity

[0003] There are many variables that affect the output process level of ion implantation machines, including the capacity of the previous process machine, the status of the machine equipment at the current station, and the process parameters at the current station. When operating manually, it is easy to cause errors and omissions or affect consistency when considering variables. sex

Images