Evaporation rate detection equipment, evaporation equipment and evaporation rate detection method
A technology of evaporation rate and detection equipment, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of material shedding, reduction, downtime, color and luminous efficiency, etc., and achieve the goal of improving product quality Effect
Pending Publication Date: 2022-01-28
BOE TECH GRP CO LTD +1
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[0005] In view of this, an embodiment of the present disclosure proposes an evaporation rate detection device, an evaporation device, and an evaporation rate detection method to solve the following problems in the prior art: when replacing a new crystal oscillator, the surface of the new crystal oscillator Smooth, the deposited material will fall off, and then there will be speed fluctuations when switching crystal oscillators, causing downtime and reduced luminous efficiency of each color
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[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Apparently, the described embodiments are some of the embodiments of the present disclosure, not all of them. Based on the described embodiments of the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without creative effort fall within the protection scope of the present disclosure.
[0029] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the usual meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are o...
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The embodiment of the invention provides evaporation rate detection equipment, evaporation equipment and an evaporation rate detection method. The equipment at least comprises a rotating baffle, a vented lid with a hole and a crystal oscillation disc; a plurality of crystal oscillation sheets are arranged on the crystal oscillation disc; the vented lid is arranged on the outer side of the crystal oscillation disc, the projection area of the vented lid covers the crystal oscillation disc, two first through holes are formed in the vented lid, and the first through holes are used for completely exposing the whole crystal oscillation piece on the crystal oscillation disc; and the rotating baffle is arranged on the outer side of the vented lid, a second through hole in a preset shape is formed in the rotating baffle, the second through hole is used for completely exposing all first crystal oscillation pieces and part of second crystal oscillation pieces in the first through holes when the rotating baffle rotates to the position where the first through holes are located according to the preset speed, and an evaporation material is evaporated with a first preset thickness on the whole second crystal oscillation pieces through the exposed part of the second crystal oscillation pieces. According to the embodiment of the invention, the evaporation rate does not fluctuate when the crystal oscillation pieces are switched, and the product quality is improved.
Description
technical field [0001] The present disclosure relates to the field of display, and in particular to an evaporation rate detection device, an evaporation device, and an evaporation rate detection method. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) display has excellent characteristics such as high contrast, thin thickness, low energy consumption, low driving voltage, wide viewing angle, fast response speed, flexible panel production, and wide operating temperature range. , is considered to be the next-generation flat-panel display emerging application technology. [0003] The current realization of the OLED device structure usually uses an evaporation process, which refers to heating organic and metal evaporation materials under certain vacuum conditions, so that the evaporation materials are melted (or sublimated) into a vapor composed of atoms, molecules or atomic groups, and then condensed on the substrate. The surface i...
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IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/547
Inventor 刘文豪加新星刘金彪罗楠肖昂姬磊李靖晋亚杰李元星胡斌周杰蒲红均兰代江李端瑞王天昊黄瑮党博谭尹茂吉刘飞熊呈祥祁泽宙汪泽峰刘雅楼
Owner BOE TECH GRP CO LTD