High-sensitivity packaging cover plate for electric field sensor and packaging device
An electric field sensor and high-sensitivity technology, which is applied to the components of electrical measuring instruments, measuring devices, electrostatic field measurement, etc., can solve the problems of reduced applicability and accuracy of sensors, and reduced sensitivity of electric field sensors, and achieve packaging accuracy. Controlling, improving usage efficiency, and ensuring the effect of packaging accuracy
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[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0029] see Figure 1-8 , an embodiment provided by the present invention:
[0030] A high-sensitivity packaging cover plate for an electric field sensor, comprising a sealing plate 1 and a sensor chip 3, the sealing plate 1 includes a packaging substrate 11, the top and side surfaces of the packaging substrate 11 are provided with vents 16, and the lower surface of the packaging substrate 11 is The isolation plate 12 is connected, the upper surface of the pac...
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