Organic film forming apparatus

Abstract

The invention provides an organic film forming apparatus which can shorten the cooling time of a workpiece after forming an organic film and can maintain the quality of the organic film. Specifically, an organic film forming apparatus according to an embodiment can heat a workpiece having a substrate, and a solution containing an organic material and a solvent coated on an upper surface of the substrate in an atmosphere reduced to below atmospheric pressure. The organic film forming apparatus is provided with: a chamber capable of maintaining the reduced pressure to an atmosphere lower than atmospheric pressure; an exhaust unit capable of exhausting the inside of the chamber; at least one temperature control unit having an outer tube that is cylindrical, extends from the outside of the chamber to the inside of the chamber, and penetrates through the chamber in an airtight manner, and a heat generation unit that is provided in the inner space of the outer tube and extends along the outer tube; and a cooling part capable of supplying a fluid into the inner space of the outer tube.

Description

technical field [0001] Embodiments of the present invention relate to an organic film forming device. Background technique [0002] As a substrate provided on an organic EL display or the like, an organic film can be used. Such organic films include polyimide films. For example, the polyimide film is formed by heating a workpiece having a substrate and a solution containing polyamic acid coated on the upper surface of the substrate to about 100° C. to 600° C. to imidize the polyamic acid. The formed polyimide film is peeled off from a board|substrate, and it is used for an organic electroluminescent display etc., for example. [0003] Here, the work on which an organic film such as a polyimide film is formed is taken out from the inside of the heat-treated chamber and conveyed to the next process or the like. However, since the workpiece is heated to about 100° C. to 600° C., it is difficult to take it out of the chamber or carry it as it is. In this case, if a cooling d...

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Problems solved by technology

[0005] However, due to the large volume of the inner space of the chamber, it takes time to cool the inner space of the chamber and thus the workpiece

[0006]Furthermore, when the cooling gas is supplied to the inner space of the chamber, it may cause sublimation that is generated when the solution is heated and adheres to the inner wall of the chamber, etc. peeled off, and then attached to the organic film

If the sublimates are attached to the organic film, the quality of the organic film will be deteriorated

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