Ultra-precision position detection photoelectric signal resolving result effectiveness evaluation method and system
A technology of photoelectric signal and evaluation method, which can be applied to measurement devices, optical devices, instruments, etc., and can solve problems such as inapplicability of complex correlation coefficients
Pending Publication Date: 2022-02-18
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology
Since the data collector in this scheme directly samples the composite signal of multiple diffraction order photoelectric signals superimposed together, the existing complex correlation coefficient (MCC) evaluation method is not suitable for this scheme
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[0043] Next, the technical solutions in the embodiments of the present invention will be described in the following examples, and the described embodiments are merely, not all of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained without creative labor are not made in the premise of creative labor.
[0044] It should be noted that if there is a directional indication in the embodiment of the present invention, the directional indication is only used to explain the relative positional relationship between the components in a particular attitude, and the movement condition, etc. if the particular attitude is changed. The direction indication is also changed accordingly.
[0045] Further, in the embodiment of the present invention relates to a "first", "second", the description, "first", "second", and the like are used only for the purpose of description, and cannot be understood as an indication or implied Its ...
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The invention provides an ultra-precision position detection photoelectric signal resolving result effectiveness evaluation method and system. Illumination light sources are moved to a total reflection area in front of an alignment grating mark; a signal generator is controlled to generate cosine voltage signals corresponding to the N diffraction order photoelectric signals by taking the time T as an interval; a cosine voltage signal output by the generator driver drives an illumination light source to generate a same-frequency cosine optical signal; a photoelectric detector carries out photoelectric conversion on the cosine optical signal, and after a signal conditioning circuit carries out bias adjustment and signal amplification, an analog-to-digital converter carries out AD conversion; the illumination light source is removed to a total reflection area after aligning to a grating mark, and the steps are repeated; and a digital signal processing module carries out cosine fitting and MCC evaluation, and two MCC minimum values are used as a basis for evaluating the effectiveness of positioning position calculation. The defect that an existing MCC evaluation method is not suitable for positioning position calculation result evaluation under the scheme that a single-channel data collector directly collects multi-diffraction-order photoelectric composite signals is overcome.
Description
Technical field [0001] The present invention relates to the field of micro-nano-machining equipment, and in particular, to a superficial position detecting photoelectric signal solution results effectiveness evaluation method and system. Background technique [0002] Ultra-precision measurement and control system is a key component of nanofabricated equipment, with a high-precision position detection function of the component (system), the precise positioning of the material to be processed can be realized. From the perspective of technical implementation, the position detection method can be divided into three classes of TTL (THROUGH THE LENS), coaxial and off-axis. The TTL position detection method achieves precise positioning between precision mold and workpiece table by measuring the raster tag position in the workpiece table coordinate system, and the coaxial position detection method passes the relative position of the positioning grating mark and the reference grating mark...
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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 李璟马会娟丁敏侠周成龙陈进新折昌美
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI